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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Blue, Robert
University of Strathclyde
in Cooperation with on an Cooperation-Score of 37%
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Publications (3/3 displayed)
- 2020MEMS gas flow sensor based on thermally induced cantilever resonance frequency shiftcitations
- 2013The development of sensors for volatile nitro-containing compounds as models for explosives detectioncitations
- 2012Microelectrode sensor utilising nitro-sensitive polymers for application in explosives detectioncitations
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article
MEMS gas flow sensor based on thermally induced cantilever resonance frequency shift
Abstract
This paper reports a novel MEMS gas flow sensor that relies on the temperature drop induced when the gas flows over an electrically heated MEMS triple-beam resonator. Modelling, simulation and characterization of the sensor has been undertaken to quantify the temperature-induced shift of resonance frequency of the resonator, which can be directly related to the rate of gas flow over the heated resonator. The MEMS resonator was actuated into mechanical resonance through application of an AC voltage to an aluminum nitride (AlN) piezoelectric layer coated on the central beam of the triple-beam resonator. A reversible change in resonance frequency was measured experimentally for nitrogen flow rates up to 5000 ml/min. At 5 V operating voltage the linear response fit measured from experiments yielded a 67 ml/min per Hz slope over a flow rate range from 0 ml/min to 4000 ml/min.