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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Chiriaev, Serguei
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Topics
Publications (19/19 displayed)
- 2023Nanoscale thinning of metal-coated polypropylene films by Helium-ion irradiation
- 2023Nanoscale thinning of metal-coated polypropylene films by Helium-ion irradiation
- 2022Post-degradation case study of the membrane electrode assembly from a low-temperature PEMFC stack
- 2022Post-degradation case study of the membrane electrode assembly from a low-temperature PEMFC stack
- 2022Insights into Degradation of the Membrane–Electrode Assembly Performance in Low-Temperature PEMFC:the Catalyst, the Ionomer, or the Interface?citations
- 2022Insights into Degradation of the Membrane–Electrode Assembly Performance in Low-Temperature PEMFCcitations
- 2020Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beamscitations
- 2019Anomalous anisotropy in superconducting nanodiamond films induced by crystallite geometrycitations
- 2018FIB NANOPATTERNING OF METAL FILMS ON PMMA SUBSTRATES: NON-SPUTTERING MODE
- 2018Transition to Superwetting for a Nanostructured Surface
- 2018Transition to Superwetting for a Nanostructured Surface
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2017Helium Ion Microscopy of proton exchange membrane fuel cell electrode structurescitations
- 2017Helium Ion Microscopy of proton exchange membrane fuel cell electrode structurescitations
- 2016Challenges of fabricating plasmonic and photonic structures with Neon ion beam milling
- 2016Titanium Nitride as a Strain Gauge Materialcitations
- 2016Titanium Nitride as a Strain Gauge Materialcitations
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article
Titanium Nitride as a Strain Gauge Material
Abstract
<p>The performance of titanium nitride (Ti-N) thin films deposited by reactive magnetron sputtering for use as a strain gauge material was investigated. Films of different composition ranging from pure titanium to over-stoichiometric Ti-N were prepared by varying the nitrogen flow to total flow ratio (α). The atomic composition was measured using Rutherford backscattering spectrometry and energy-dispersive X-ray spectroscopy. The structure of the films was studied using X-ray diffraction and scanning electron microscopy, revealing the formation of a columnar film morphology consisting of cubic-Ti-N grains with preferential crystal orientations depending on the flow ratio α. The stability of the film resistivity was studied at 200 °C for 360 h. Films deposited at low (αleq 0.08) and high (α = 0.60) nitrogen flows exhibited a stable behavior relative to films deposited with intermediate nitrogen flows. The longitudinal piezoresistive gauge factor was found to increase with increasing nitrogen flow before settling at values of 6-6.35. Finally, the temperature coefficient of resistivity was found to be less than 300 ppm/°C for the films with the highest gauge factors. The results demonstrate that the Ti-N films have a good potential as a strain gauge material, especially due to the relatively high gauge factor. [2016-0040]</p>