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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Karuthedath, Cyril Baby
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2023Non-monolithic fabrication of thin-film microelectrode arrays on PMUT transducers as a bimodal neuroscientific investigation toolcitations
- 2023An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implantscitations
- 2023Piezoelectric ultrasonic transducer and system
- 2023Phase-Sensitive Air Flow Measurement Using PMUTscitations
- 2021Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabricationcitations
- 2021Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabricationcitations
- 2020The impact of residual stress on resonating piezoelectric devicescitations
- 2019Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurementscitations
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document
Phase-Sensitive Air Flow Measurement Using PMUTs
Abstract
This paper presents an ultrasound-based airflow measurement using Piezoelectric Micromachined Ultrasonic Transducer (PMUT) transceivers. Two PMUTs are utilized, each with an active area of 0.28 mm 2 (chip size can be smaller than 1 mm × 1 mm), to measure the flow. The proposed flowmeter employs a phase-sensitive measurement technique that takes advantage of the phase difference between signals received upstream and downstream. The volumetric flow rate is directly proportional to the observed phase difference, and the sign of the phase difference indicates the direction of the flow. The performance of the developed flow meter is tested across a range of flow rates, from 0 to 52 Standard Liters per Minute (SLM), demonstrating high sensitivity and linearity. The small size and low operating voltage of the proposed flow meter make it particularly suitable for space and power limited applications.