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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Gundel, Hartmut
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Topics
Publications (21/21 displayed)
- 2022Crystallographic orientation dependence of ferroelectric domain walls in antiferroelectric lead zirconate thin filmscitations
- 2021Characterization and Performance Analysis of BST-Based Ferroelectric Varactors in the Millimeter-Wave Domaincitations
- 2020Effect of ferroelectric domain walls on the dielectric properties of PbZrO3 thin filmscitations
- 2014Dielectric long time relaxation of domains walls in PbZrTiO3 thin filmscitations
- 2014Electrophoretic deposition of BaTiO3 thin films from stable colloidal aqueous solutionscitations
- 2013A new method of dielectric characterization in the microwave range for high-k ferroelectric thin filmscitations
- 2012Miniaturized and Reconfigurable Notch Antennas Using a BST Thin Film Varactor
- 2011Wet chemical etching of BaSrTiO3 ferroelectric thin films for intelligent antenna application
- 2011The effect of Mn doping on the dielectric properties and domain wall mobility of (Ba0.8Sr0.2)TiO3 thin films
- 2011Ferroelectric thin films for mobile communication applications
- 2011Measurement and Modeling of Dielectric Properties of Pb(Zr,Ti)O-3 Ferroelectric Thin Filmscitations
- 2011Dielectric properties of PZT thin films under a low AC-electric field at different bias fields
- 2011Description of the low field nonlinear dielectric properties of ferroelectric and multiferroic materialscitations
- 2010Measurement and modelisation of dielectric properties of ferroelectrics thin layers
- 2010Description of the nonlinear dielectric properties of ferroelectrics under a weak AC-fieldcitations
- 2008Preparation and characterization of barium strontium titanate thin films by chemical solution depositioncitations
- 2008Influence of the morphology of Barium Strontium Titanate thin films on the ferroelectric and dielectric propertiescitations
- 20071-D modelisation of a BaTiO3 single crystal
- 2006Polymer poling characterization using Second Harmonic Generation (SHG)citations
- 2005Elaboration of strontium ruthenium oxide thin film on metal substrate by chemical solution depositioncitations
- 2003Conducting strontium ruthenium oxide interface layers for application to PZT/SrRuO3/Metal thin film capacitorscitations
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document
A new method of dielectric characterization in the microwave range for high-k ferroelectric thin films
Abstract
In this paper we propose a new method of dielectric characterization of high-k thin films based on the measurement of coplanar capacitor inserts between two coplanar waveguide transmission lines. The measurement geometry is deposed on the thin film which is elaborate on an insulating substrate. The thin film permittivity is extracted with the help of a mathematical model describing the capacitance between two conductor plates deposed on a 2-layers substrate. A simple correction is proposed in order to enhance the matching between the model and the full wave simulation. The results of the proposed measurement method are compared to those of a classical characterization technique using parallel plate capacitor geometry.