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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cummins, Gerard
University of Birmingham
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2019Miniaturized 3-D Cross-Type Receiver for Wirelessly Powered Capsule Endoscopycitations
- 2018Nanocomposite-Based Microstructured Piezoresistive Pressure Sensors for Low-Pressure Measurement Rangecitations
- 2016Progress towards a multi-modal capsule endoscopy device featuring microultrasound imagingcitations
- 2016Carbon screen-printed electrodes on ceramic substrates for label-free molecular detection of antibiotic resistancecitations
- 2015Electrodeposited magnetostrictive Fe-Ga alloys for miniaturised actuatorscitations
- 2014Characterization and Development of Materials for an Integrated High-Temperature Sensor Using Resistive Test Structures
- 2014Statistical analysis of stencil technology for wafer-level bumpingcitations
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document
Electrodeposited magnetostrictive Fe-Ga alloys for miniaturised actuators
Abstract
<p>The application of magnetostrictive materials in MEMS devices requires the development of suitable micromachining technologies for the deposition and patterning at the microscale. Some alloys of iron and gallium, generally classified under the generic name of Galfenol (Fe<sub>1-x</sub>-Ga<sub>x</sub>, 0.10 ≤x≤ 0.35), are known for their excellent magnetostrictive and mechanical properties, which make them ideal candidates for the manufacturing of magnetostrictive microactuator devices. Although techniques have been reported for the machining of such materials at a bigger scale, adequate miniaturisation technologies are sought after to enable the integration of Galfenol into MEMS devices. For this purpose, electrodeposition is an appealing technique as it enables rapid and relatively inexpensive growth, while eliminating the need for selective etching processes. This paper presents advances towards the development of a reliable and reproducible process for the electrodeposition of micrometre-thick Galfenol films through systematic experimental characterisation. A preliminary application is finally presented in the form of bilayer cantilevers fabricated by depositing Galfenol on top of copper beams that can be deflected by applying a uniform external magnetic field.</p>