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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Calmon, Pierre-François
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (6/6 displayed)
- 2024Optical Feedback FM-to-AM Conversion with integrated Micro-Ring Resonator for Displacement Sensing Applicationscitations
- 2018Coupled-mode analysis of vertically-coupled AlGaAs/AlOx microdisk resonatorscitations
- 2017Buried Waveguides using a Quasi-Planar Process
- 2016III-V-semiconductor vertically-coupled whispering-gallery mode resonators made by selective lateral oxidation
- 2015Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technologycitations
- 2015AlOx/AlGaAs technology for multi-plane integrated photonic devices
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document
AlOx/AlGaAs technology for multi-plane integrated photonic devices
Abstract
The III-V semiconductor /oxide technology has become the standard fabrication technique for Vertical-Cavity Surface-Emitting Lasers. Current research aims to further enhance the performance of these emitters and diversify the range of devices that can be made using this technology. In this paper, we present a new model of the oxidation process which includes the anisotropic behaviour observed during conventional lateral oxidation. Furthermore, we demonstrate that this technology can be used as an innovative method to make micro-disk resonators with vertically-coupled access waveguides, an approach which can be generalised to fabricate other types of multi-plane photonic devices.