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Reed, Graham
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Publications (6/6 displayed)
- 2021High-bandwidth InGaAs photodetectors heterogeneously integrated on silicon waveguides using optofluidic assemblycitations
- 2020Silicon erasable waveguides and directional couplers by germanium ion implantation for configurable photonic circuitscitations
- 2018Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devicescitations
- 2017Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Trimming of ring resonators via ion implantation in siliconcitations
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document
Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
Abstract
We demonstrate a new post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. Preliminary results demonstrate a phase trimming accuracy of 0.146π.