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Franz, Yohann
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Publications (7/7 displayed)
- 2020Laser processed semiconductors for integrated photonic devices
- 2019Laser processing of amorphous semiconductors on planar substrates for photonic and optoelectronic applications
- 2017Laser annealing of low temperature deposited silicon waveguidescitations
- 2017Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguidescitations
- 2017Tapered silicon core fibers with nano-spikes for optical coupling via spliced silica fiberscitations
- 2015A silicon/lithium niobate hybrid photonic material platform produced by laser processing
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document
Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
Abstract
We demonstrate a new post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. Preliminary results demonstrate a phase trimming accuracy of 0.146π.