| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Serdijn, Wouter A.
Delft University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2022Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfacescitations
- 2022Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfacescitations
- 2020Long-term encapsulation of platinum metallization using a HfO2 ALD - PDMS bilayer for non-hermetic active implantscitations
- 2019Effect of Signals on the Encapsulation Performance of Parylene Coated Platinum Tracks for Active Medical Implantscitations
- 2019The influence of soft encapsulation materials on the wireless power transfer links efficiency
- 2019Energy efficient sampling and conversion of bio-signals using time-mode circuits
- 2019Towards an Active Graphene-PDMS Implant
- 2018MEMS-Electronics Integration 2: A Smart Temperature Sensor for an Organ-on-a-chip Platform
Places of action
| Organizations | Location | People |
|---|
conferencepaper
Long-term encapsulation of platinum metallization using a HfO2 ALD - PDMS bilayer for non-hermetic active implants
Abstract
S.467-472 ; In this work, we investigate the insulating performance of an atomic layer deposited (ALD) HfO2 - polymer bilayer for platinum (Pt) metallization. As test vehicles, Pt interdigitated comb structures (IDC) were designed and fabricated on SiO2/Si substrates. The IDCs were first coated with a 100 nm thin HfO2 ALD layer. A group of samples was further encapsulated with a low-viscosity biocompatible polydimethylsiloxane (PDMS) which resulted in an HFO2-PDMS bilayer. All samples were soaked in phosphate buffered saline for 450 days at room temperature. Evaluation of the coatings included monthly optical inspection and electrochemical impedance spectrometry. For ALD-only coated IDC structures, impedance results right after submersion in saline indicated the presence of defects in the layer. Long-term impedance recordings showed a slight drop, indicating water ingress through the defects, further exposing the metal to saline. For the HfO2-PDMS encapsulated samples, on the other hand, stable impedance results were recorded over the duration of the soak study. This suggests the excellent properties of low-viscosity PDMS both in filling the defects of the ALD layer and in maintaining a long-term underwater adhesion to HfO2. The results from this investigation, therefore, propose a new encapsulation method based on HfO2-PDMS bilayer for long-term packaging of active implants incorporating Pt metallization.