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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Siegel, Jan
Consejo Superior de Investigaciones Científicas
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (24/24 displayed)
- 2024Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelengthcitations
- 2024Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelengthcitations
- 2024Optoplasmonic tuneable response by femtosecond laser irradiation of glass with deep-implanted gold nanoparticles
- 2024Optoplasmonic tuneable response by femtosecond laser irradiation of glass with deep-implanted gold nanoparticles
- 2022Propagation dynamics of the solid–liquid interface in Ge upon ns and fs laser irradiationcitations
- 2022Mechanisms driving self-organization phenomena in random plasmonic metasurfaces under multipulse femtosecond laser exposure: a multitime scale studycitations
- 2021Anisotropic Resistivity Surfaces Produced in ITO Films by Laser‐Induced Nanoscale Self‐organizationcitations
- 2021Deep surface amorphization in silicon induced by spectrally-tuned ultrashort laser pulses
- 2020The Role of the Laser-Induced Oxide Layer in the Formation of Laser-Induced Periodic Surface Structurescitations
- 2019Surface Plasmon Polaritons on Rough Metal Surfaces: Role in the Formation of Laser-Induced Periodic Surface Structurescitations
- 2018Biomimetic surface structures in steel fabricated with femtosecond laser pulses: influence of laser rescanning on morphology and wettabilitycitations
- 2018Author Correction: Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulsescitations
- 2018Controlling the Wettability of Steel Surfaces Processed with Femtosecond Laser Pulsescitations
- 2018Optical spectroscopy study of nano- and microstructures fabricated by femtosecond laser pulses on ZnO based systemscitations
- 2017Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulsescitations
- 2014Origin of the refractive index modification of femtosecond laser processed doped phosphate glasscitations
- 2013Nanostructuring thin polymer films with optical near fieldscitations
- 2011Dynamics of laser-induced phase switching in GeTe filmscitations
- 2009Hot-wire chemical vapor growth and characterization of crystalline GeTe filmscitations
- 2008Amorphization dynamics of Ge2 Sb2 Te5 films upon nano- and femtosecond laser pulse irradiationcitations
- 2008Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphidecitations
- 2006Time- and space-resolved dynamics of melting, ablation, and solidification phenomena induced by femtosecond laser pulses in germaniumcitations
- 2005Imaging the dissociation processs of O2 background gas during pulsed laser ablation of LiNbO3citations
- 2004Rewritable phase-change optical recording in Ge₂Sb₂Te₅ films induced by picosecond laser pulsescitations
Places of action
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conferencepaper
Deep surface amorphization in silicon induced by spectrally-tuned ultrashort laser pulses
Abstract
Irradiation of crystalline silicon with ultrashort laser pulses is a well-known method for creating thin amorphous surface layers. The underlying mechanisms are based on ultrafast melting and rapid quenching of the molten phase, preventing the formation of the crystalline phase. The interest of this method for applications in the electronics industry lies in the very different electrical properties of the amorphous phase obtained. It has also triggered strong attention in the field of silicon photonics, the amorphous phase exhibiting a higher refractive index than the crystalline phase at telecom wavelengths. This simple feature could be exploited for low-loss optical waveguiding in a thin amorphous surface layer, provided the latter is sufficiently thick. However, the maximum thickness of laser-induced amorphous layers reported to date is < 70 nm [1] , which is below the requirements for supporting guided modes.