People | Locations | Statistics |
---|---|---|
Naji, M. |
| |
Motta, Antonella |
| |
Aletan, Dirar |
| |
Mohamed, Tarek |
| |
Ertürk, Emre |
| |
Taccardi, Nicola |
| |
Kononenko, Denys |
| |
Petrov, R. H. | Madrid |
|
Alshaaer, Mazen | Brussels |
|
Bih, L. |
| |
Casati, R. |
| |
Muller, Hermance |
| |
Kočí, Jan | Prague |
|
Šuljagić, Marija |
| |
Kalteremidou, Kalliopi-Artemi | Brussels |
|
Azam, Siraj |
| |
Ospanova, Alyiya |
| |
Blanpain, Bart |
| |
Ali, M. A. |
| |
Popa, V. |
| |
Rančić, M. |
| |
Ollier, Nadège |
| |
Azevedo, Nuno Monteiro |
| |
Landes, Michael |
| |
Rignanese, Gian-Marco |
|
Van Den Berg, Albert
University of Twente
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (40/40 displayed)
- 2024Alternative nano-lithographic tools for shell-isolated nanoparticle enhanced Raman spectroscopy substrates
- 2023Fabrication of homogeneous shell-isolated sers substrates for catalytic applications
- 2021Monitoring contractile cardiomyocytes via impedance using multipurpose thin film ruthenium oxide electrodescitations
- 2020Using 3D-printing to fabricate a microfluidic vascular model to mimic arterial thrombosis
- 2020Plasmonic Nanocrystal Arrays on Photonic Crystals with Tailored Optical Resonancescitations
- 2017Sensing oxygen at the millisecond time-scale using an ultra-microelectrode array (UMEA)citations
- 2017Synchrotron SAXS and Impedance Spectroscopy Unveil Nanostructure Variations in Redox-Responsive Porous Membranes from Poly(ferrocenylsilane) Poly(ionic liquid)scitations
- 2017Mimicking arterial thrombosis in a 3D-printed microfluidic in vitro vascular model based on computed tomography angiography datacitations
- 2016Molecularly Imprinted Polymer-Carbon Nanotube based Cotinine sensorcitations
- 2016Effects of varying degrees of surface strain anisotropies on endothelial cells
- 2016Endothelial cell alignment as a result of anisotropic strain and flow induced shear stress combinationscitations
- 2015Functionalization and bioimmobilization of silicon surfaces with Si-N bonded monolayercitations
- 2014Modeling and simulations of the amplitude-frequency response of transmission line type resonators filled with lossy dielectric fluidscitations
- 2014The contribution of plasmon-enhanced photoluminescence to the SERS backgroundcitations
- 2014A novel side electrode configuration integrated in fused silica microsystems for synchronous optical and electrical spectroscopycitations
- 2014Stub resonators for online monitoring early stages of corrosioncitations
- 2013Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps
- 2013Large area metal nanowire arrays with tunable sub-20nm nanogapscitations
- 2012Fabrication of cell container arrays with overlaid surface topographiescitations
- 2011Thermoforming of film-based biomedical microdevicescitations
- 2010A lab-on-a-chip system integrated with subwavelength periodic patterned metal surfaces for sers-based molecular identification biosensing
- 2009Silicon and Glass Micromachining
- 2008AC field effect flow control of EOF in complex microfluidic systems with integrated electrodes
- 2007Integrated electrochemical sensor array for on-line monitoring of yeast fermentationscitations
- 2007Simple technique for direct patterning of nanowires using a nanoslit shadow-maskcitations
- 2006Fabrication of microfluidic networks with integrated electrodescitations
- 2006Monitoring of yeast cell concentration using a micromachnined impedance sensorcitations
- 2005Technologies for nanofluidic systems:top-down vs. bottom-up - a reviewcitations
- 2005Monitoring of yeast cell concentration using a micromachined impedance sensor
- 2005Catalytic hydrogen peroxide decomposition La1-xSrxCoO3-δ perovskite oxidescitations
- 2004The potential of autofluorescence for the detection of single living cells for label-free cell sorting in microfluidic systemscitations
- 20041-D nanochannels fabricated in polyimidecitations
- 2003A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactorscitations
- 2003A low hydraulic capacitance pressure sensor for integration with a micro viscosity detectorcitations
- 2002Integrated Micro- and Nanofluidics: Silicon Revisitedcitations
- 2001Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connectionscitations
- 2001Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensorscitations
- 2001Failure mechanisms of pressurized microchannels, model, and experimentscitations
- 2001Selective Wafer Bonding by Surface Roughness Controlcitations
- 2000Failure mechanisms of pressurized microchannels, model and experiments
Places of action
Organizations | Location | People |
---|
article
Failure mechanisms of pressurized microchannels, model, and experiments
Abstract
MicrochanneIs were created by fusion bonding of a Pyrex cover to a thermally oxidized silicon wafer, which contained anisotropically etched grooves. Such channels are frequently used in microfluidic handling systems, for example, in chemical analysis. Since in some of these labs-on-a-chip, in particular those used in liquid chromatography, the channels are subjected to high pressures of up to a few hundred bar, it is important to have information about the mechanical stability of the channel chip, in particular of the wafer bond involved in it. The latter is the subject of this paper. The maximum pressure that can be applied to several different channel chips was investigated experimentally. In order to find the relation among this maximum pressure, channel geometry, materials elasticity, and bond energy, an energy model was developed that is generally applicable to all types of wafer bonds. It was shown that the model is substantiated by the experimental pressure data, from which it could be calculated that the effective bond energy increased from 0.018 to 0.19 J/m2 for an annealing temperature ranging from 310 to 470°C