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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Bertram, Florian
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (32/32 displayed)
- 2024Millisecond X-ray reflectometry and neural network analysis: unveiling fast processes in spin coatingcitations
- 2024Halide Segregated Crystallization of Mixed-Halide Perovskites Revealed by In Situ GIWAXScitations
- 2023Elucidating Structure Formation in Highly Oriented Triple Cation Perovskite Filmscitations
- 2023Real-Time Monitoring of Strain Accumulation and Relief during Epitaxy of Ultrathin Co Ferrite Films with Varied Co Content
- 2023Reversible Ultrathin PtO$_x$ Formation at the Buried Pt/YSZ(111) Interface Studied In Situ under Electrochemical Polarizationcitations
- 2023Temperature dependent interaction of hydrogen with PdAg nanocomposite thin films revealed by in-situ synchrotron XRDcitations
- 2022In-situ investigation on hydrogenation-dehydrogenation of Pd–Ag alloy filmscitations
- 2022Effect of the valence state on the band magnetocrystalline anisotropy in two-dimensional rare-earth/noble-metal compoundscitations
- 2022Real-Time Monitoring the Growth of Epitaxial CoxFe3−xO4 Ultrathin Films on Nb-Doped SrTiO3(001) via Reactive Molecular Beam Epitaxy by Means of Operando HAXPES
- 2022Time-resolved x-ray diffraction and photoelectron spectroscopy investigation of the reactive molecular beam epitaxy of Fe$_3$O$_4$ ultrathin filmscitations
- 2021Quantitative comparison of the magnetic proximity effect in Pt detected by XRMR and XMCDcitations
- 2021Quantitative comparison of the magnetic proximity effect in Pt detected by XRMR and XMCDcitations
- 2021Quantitative comparison of the magnetic proximity effect in Pt detected by XRMR and XMCDcitations
- 2021Devitrification of thin film Cu–Zr metallic glass via ultrashort pulsed laser annealingcitations
- 2021Cationic Ordering and Its Influence on the Magnetic Properties of Co-Rich Cobalt Ferrite Thin Films Prepared by Reactive Solid Phase Epitaxy on Nb-Doped SrTiO3(001)citations
- 2020Structure of two-dimensional Fe3O4citations
- 2020Structure of two-dimensional $Fe_{3}O_{4}$citations
- 2020Crystal-structure of active layers of small molecule organic photovoltaics before and after solvent vapor annealingcitations
- 2020Beam damage of single semiconductor nanowires during X-ray nano beam diffraction experimentscitations
- 2020Interface between Water–Solvent Mixtures and a Hydrophobic Surfacecitations
- 2019Current Mapping of Lead Phthalocyanine Thin Films in the Presence of Gaseous Dopantscitations
- 2019Potential-Induced Pitting Corrosion of an $mathrm{IrO_{2}(110)-RuO_{2}(110)/Ru(0001)}$ Model Electrode under Oxygen Evolution Reaction Conditionscitations
- 2019Surface oxide development on aluminum alloy 6063 during heat treatmentcitations
- 2019Potential-Induced Pitting Corrosion of an IrO2(110)-RuO2(110)/Ru(0001) Model Electrode under Oxygen Evolution Reaction Conditionscitations
- 2017Confining metal-halide perovskites in nanoporous thin filmscitations
- 2017Confining metal-halide perovskites in nanoporous thin filmscitations
- 2017Integration of electrochemical and synchrotron-based X-ray techniques for in-situ investigation of aluminum anodizationcitations
- 2017Anodization of Al(100), Al(111) and Al Alloy 6063 studied in situ with X-ray reflectivity and electrochemical impedance spectroscopycitations
- 2015Magnetic anisotropy related to strain and thickness of ultrathin iron oxide films on MgO(001)citations
- 2015Modifying magnetic properties of ultra-thin magnetite films by growth on Fe pre-covered MgO(001)citations
- 2015X-ray photoemission analysis of clean and carbon monoxide-chemisorbed platinum(111) stepped surfaces using a curved crystal.citations
- 2014Ultrathin, epitaxial cerium dioxide on siliconcitations
Places of action
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article
Millisecond X-ray reflectometry and neural network analysis: unveiling fast processes in spin coating
Abstract
<jats:p>X-ray reflectometry (XRR) is a powerful tool for probing the structural characteristics of nanoscale films and layered structures, which is an important field of nanotechnology and is often used in semiconductor and optics manufacturing. This study introduces a novel approach for conducting quantitative high-resolution millisecond monochromatic XRR measurements. This is an order of magnitude faster than in previously published work. Quick XRR (qXRR) enables real time and <jats:italic>in situ</jats:italic> monitoring of nanoscale processes such as thin film formation during spin coating. A record qXRR acquisition time of 1.4 ms is demonstrated for a static gold thin film on a silicon sample. As a second example of this novel approach, dynamic <jats:italic>in situ</jats:italic> measurements are performed during PMMA spin coating onto silicon wafers and fast fitting of XRR curves using machine learning is demonstrated. This investigation primarily focuses on the evolution of film structure and surface morphology, resolving for the first time with qXRR the initial film thinning via mass transport and also shedding light on later thinning via solvent evaporation. This innovative millisecond qXRR technique is of significance for <jats:italic>in situ</jats:italic> studies of thin film deposition. It addresses the challenge of following intrinsically fast processes, such as thin film growth of high deposition rate or spin coating. Beyond thin film growth processes, millisecond XRR has implications for resolving fast structural changes such as photostriction or diffusion processes.</jats:p>