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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Pohl, Darius
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2024Eco‐Friendly Approach to Ultra‐Thin Metal Oxides‐ Solution Sheared Aluminum Oxide for Half‐Volt Operation of Organic Field‐Effect Transistorscitations
- 2024Eco‐Friendly Approach to Ultra‐Thin Metal Oxides‐ Solution Sheared Aluminum Oxide for Half‐Volt Operation of Organic Field‐Effect Transistorscitations
- 2023Tailoring the Morphology of a Diketopyrrolopyrrole-based Polymer as Films or Wires for High-Performance OFETs using Solution Shearingcitations
- 2023Tunable Crystallinity and Electron Conduction in Wavy 2D Conjugated Metal–Organic Frameworks via Halogen Substitutioncitations
- 2022Atomic layer deposition of yttrium iron garnet thin filmscitations
- 2021Single-step reactive ion etching process for device integration of hafnium-zirconium-oxide (HZO)/titanium nitride (TiN) stackscitations
- 2021Controlled Silicidation of Silicon Nanowires Using Flash Lamp Annealingcitations
- 2020Control of positive and negative magnetoresistance in iron oxide−iron nanocomposite thin films for tunable magnetoelectric nanodevicescitations
- 2020Heterostructured Bismuth Telluride Selenide Nanosheets for Enhanced Thermoelectric Performance
- 2020Control of Positive and Negative Magnetoresistance in Iron Oxide : Iron Nanocomposite Thin Films for Tunable Magnetoelectric Nanodevices
- 2020Natural hybrid silica/protein superstructure at atomic resolutioncitations
- 2014Local band gap measurements by VEELS of thin film solar cellscitations
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article
Atomic layer deposition of yttrium iron garnet thin films
Abstract
<p>Magnetic nanostructures with nontrivial three-dimensional (3D) shapes enable complex magnetization configurations and a wide variety of new phenomena. To date predominantly magnetic metals have been considered for nontrivial 3D nanostructures, although the magnetic and electronic transport responses are intertwined in metals. Here we report the first successful fabrication of the magnetic insulator yttrium iron garnet (Y3Fe5O12, YIG) via atomic layer deposition (ALD) and show that conformal coating of 3D objects is possible. We utilize a supercycle approach based on the combination of subnanometer thin layers of the binary systems Fe2O3 and Y2O3 in the correct atomic ratio with a subsequent annealing step for the fabrication of ALD-YIG films on Y3Al5O12 substrates. Our process is robust against typical growth-related deviations, ensuring a good reproducibility. The ALD-YIG thin films exhibit a high crystalline quality as well as magnetic properties comparable to samples obtained by other deposition techniques. We show that the ALD-YIG thin films are conformal. This enables the fabrication of 3D YIG nanostructures once appropriate nonmagnetic, 3D templates are developed. Such 3D YIG structures build the groundwork for the experimental investigation of curvature-induced changes on pure spin currents and magnon transport effects.</p>