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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Eng, Lukas
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (26/26 displayed)
- 2024Probing Ferroelectric Phase Transitions in Barium Titanate Single Crystals via in-situ Second Harmonic Generation Microscopy
- 2023Impact of Ferroelectric Layer Thickness on Reliability of Back-End-of-Line-Compatible Hafnium Zirconium Oxide Filmscitations
- 2023A Study on Imprint Behavior of Ferroelectric Hafnium Oxide Caused by High-Temperature Annealingcitations
- 2023Polarization Sensitivity in Scattering-Type Scanning Near-Field Optical Microscopy—Towards Nanoellipsometrycitations
- 2022Atomic layer deposition of yttrium iron garnet thin filmscitations
- 2022Effect of Al2O3 interlayers on the microstructure and electrical response of ferroelectric doped HfO2 thin filmscitations
- 2021Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Filmscitations
- 2021Electric field-induced crystallization of ferroelectric hafnium zirconium oxidecitations
- 2021Tricyanidoferrates(−IV) and Ruthenates(−IV) with Non-Innocent Cyanido Ligandscitations
- 2021Influence of Annealing Temperature on the Structural and Electrical Properties of Si-Doped Ferroelectric Hafnium Oxidecitations
- 2021Impact of the SiO2interface layer on the crystallographic texture of ferroelectric hafnium oxidecitations
- 2020Structural and electrical comparison of si and zr doped hafnium oxide thin films and integrated fefets utilizing transmission kikuchi diffractioncitations
- 2016Multidomain Skyrmion Lattice State in Cu2OSeO3citations
- 2015Conductivity and magnetoresistance of La0.7Ce0.3MnO3-δ thin films under photoexcitationcitations
- 2015Optical antennae for near-field induced nonlinear photochemical reactions of photolabile azo-and amine groups
- 2014The Mn2+/Mn3+ state of La0.7Ce 0.3MnO3 by oxygen reduction and photodopingcitations
- 2014Near-field resonance shifts of ferroelectric barium titanate domains upon low-temperature phase transitioncitations
- 2013Strain-mediated elastic coupling in magnetoelectric nickel/barium-titanate heterostructurescitations
- 2010Web-like domain structure formation in barium titanate single crystalscitations
- 2010Poly(2-(dimethylamino)ethyl methacrylate) brushes with incorporated nanoparticles as a SERS active sensing layercitations
- 2010Fabrication of two-dimensional Au@FePt core-shell nanoparticle arrays by photochemical metal depositioncitations
- 2009Probing polarization and dielectric function of molecules with higher order harmonics in scattering-near-field scanning optical microscopycitations
- 2009Ferroelectric Lithographycitations
- 2005Surface photovoltage spectroscopy for the investigation of perovskite oxide interfacescitations
- 2002Metal salt complexation of spin-coated ultrathin diazosulfonate terpolymer filmscitations
- 2002Novel diazosulfonate terpolymers for the preparation of structured functionalized surfaces
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article
Atomic layer deposition of yttrium iron garnet thin films
Abstract
<p>Magnetic nanostructures with nontrivial three-dimensional (3D) shapes enable complex magnetization configurations and a wide variety of new phenomena. To date predominantly magnetic metals have been considered for nontrivial 3D nanostructures, although the magnetic and electronic transport responses are intertwined in metals. Here we report the first successful fabrication of the magnetic insulator yttrium iron garnet (Y3Fe5O12, YIG) via atomic layer deposition (ALD) and show that conformal coating of 3D objects is possible. We utilize a supercycle approach based on the combination of subnanometer thin layers of the binary systems Fe2O3 and Y2O3 in the correct atomic ratio with a subsequent annealing step for the fabrication of ALD-YIG films on Y3Al5O12 substrates. Our process is robust against typical growth-related deviations, ensuring a good reproducibility. The ALD-YIG thin films exhibit a high crystalline quality as well as magnetic properties comparable to samples obtained by other deposition techniques. We show that the ALD-YIG thin films are conformal. This enables the fabrication of 3D YIG nanostructures once appropriate nonmagnetic, 3D templates are developed. Such 3D YIG structures build the groundwork for the experimental investigation of curvature-induced changes on pure spin currents and magnon transport effects.</p>