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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Rellinghaus, Bernd
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2024Eco‐Friendly Approach to Ultra‐Thin Metal Oxides‐ Solution Sheared Aluminum Oxide for Half‐Volt Operation of Organic Field‐Effect Transistorscitations
- 2024Eco‐Friendly Approach to Ultra‐Thin Metal Oxides‐ Solution Sheared Aluminum Oxide for Half‐Volt Operation of Organic Field‐Effect Transistorscitations
- 2023Tailoring the Morphology of a Diketopyrrolopyrrole-based Polymer as Films or Wires for High-Performance OFETs using Solution Shearingcitations
- 2023Tunable Crystallinity and Electron Conduction in Wavy 2D Conjugated Metal–Organic Frameworks via Halogen Substitutioncitations
- 2022Atomic layer deposition of yttrium iron garnet thin filmscitations
- 2021Single-step reactive ion etching process for device integration of hafnium-zirconium-oxide (HZO)/titanium nitride (TiN) stackscitations
- 2021Multimode Operation of Organic--Inorganic Hybrid Thin-Film Transistors Based on Solution-Processed Indium Oxide Filmscitations
- 2020Natural hybrid silica/protein superstructure at atomic resolutioncitations
- 2020Highly crystalline and semiconducting imine‐based two‐dimensional polymers enabled by interfacial synthesis
- 2018Influence of Sputtering Pressure on the Microstructure and Layer Properties of Iridium Thin Films
- 2018Core–Shell Structuring of Pure Metallic Aerogels towards Highly Efficient Platinum Utilization for the Oxygen Reduction Reactioncitations
- 2017Probabilistically based defect analysis and structure-property-relations in CF
- 2017Core–Shell Structuring of Pure Metallic Aerogels towards Highly Efficient Platinum Utilization for the Oxygen Reduction Reactioncitations
- 2016Electron beam induced dehydrogenation of MgH 2 studied by VEELS
- 2016Electron beam induced dehydrogenation of MgH2 studied by VEELS
- 2014Local band gap measurements by VEELS of thin film solar cellscitations
- 2014Graphene coatings for the mitigation of electron stimulated desorption and fullerene cap formationcitations
- 2013Understanding the catalyst-free transformation of amorphous carbon into graphene by current-induced annealingcitations
- 2010Investigating the Outskirts of Fe and Co Catalyst Particles in Alumina-Supported Catalytic CVD Carbon Nanotube Growthcitations
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article
Atomic layer deposition of yttrium iron garnet thin films
Abstract
<p>Magnetic nanostructures with nontrivial three-dimensional (3D) shapes enable complex magnetization configurations and a wide variety of new phenomena. To date predominantly magnetic metals have been considered for nontrivial 3D nanostructures, although the magnetic and electronic transport responses are intertwined in metals. Here we report the first successful fabrication of the magnetic insulator yttrium iron garnet (Y3Fe5O12, YIG) via atomic layer deposition (ALD) and show that conformal coating of 3D objects is possible. We utilize a supercycle approach based on the combination of subnanometer thin layers of the binary systems Fe2O3 and Y2O3 in the correct atomic ratio with a subsequent annealing step for the fabrication of ALD-YIG films on Y3Al5O12 substrates. Our process is robust against typical growth-related deviations, ensuring a good reproducibility. The ALD-YIG thin films exhibit a high crystalline quality as well as magnetic properties comparable to samples obtained by other deposition techniques. We show that the ALD-YIG thin films are conformal. This enables the fabrication of 3D YIG nanostructures once appropriate nonmagnetic, 3D templates are developed. Such 3D YIG structures build the groundwork for the experimental investigation of curvature-induced changes on pure spin currents and magnon transport effects.</p>