| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Ganesan, Rajesh
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2024Room-temperature sputter deposition of gold-colored TiN assisted by niobium bombardment from a bipolar HiPIMS sourcecitations
- 2021External magnetic field guiding in HiPIMS to control sp3fraction of tetrahedral amorphous carbon filmscitations
- 2021Noble gas control of diamond-like content and compressive stress in carbon films by arc-mixed mode high power impulse magnetron sputteringcitations
- 2018Quantifying plasma immersion ion implantation of insulating surfaces in a dielectric barrier discharge: how to control the dosecitations
- 2018Quantifying plasma immersion ion implantation of insulating surfaces in a dielectric barrier discharge: how to control the dosecitations
- 2017Evolution of target condition in reactive HiPIMS as a function of duty cycle: An opportunity for refractive index gradingcitations
- 2017Evolution of target condition in reactive HiPIMS as a function of duty cycle: an opportunity for refractive index gradingcitations
- 2009Synthesis of Single-Phase Sn3P4 by an isopiestic methodcitations
Places of action
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article
Quantifying plasma immersion ion implantation of insulating surfaces in a dielectric barrier discharge: how to control the dose
Abstract
<jats:p>The plasma physics of dielectric barrier discharges (DBD) for carrying out ion implantation in insulators is investigated. A hollow cathode DBD excited by high-voltage pulses is suitable for ion bombardment of the surfaces of insulating tubing, porous material, particles and sheets. Plasma immersion ion implantation of insulating surfaces is useful for many applications in medicine and engineering. The ion bombardment of glass is useful for cleaning and surface modification. The ion implantation of polymers creates radicals that are able to bind molecules to their surfaces for applications in medical procedures and diagnostics. A wire diagnostic probe and optical emission spectroscopy are used for experimental work. A theory based on mutual capacitance is developed to convert data from the probe to give implanted charge as a function of pressure, voltage and pulse duration. We find the operating conditions that allow for charge to be implanted and those that achieve the highest implanted charge.</jats:p>