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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Bäuerle, Dieter
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Topics
Publications (11/11 displayed)
- 2010Modification and nano-patterning of high-Tc superconducting thin films by masked ion beam irradiationcitations
- 2009Masked ion beam irradiation of high-temperature superconductors: patterning of nano-size regions with high point-defect densitycitations
- 2006Ion-beam modification of high-temperature superconductor thin films for the fabrication of superconductive nanodevices
- 2006Non-exponential optical modification of the electrical properties in oxygen-deficient YBa2Cu3Ox
- 2006Angle dependence of the Hall effect in HgBa2 CaCu2 O6 thin filmscitations
- 2006Ion-beam direct-structuring of high-temperature superconductorscitations
- 2006Angle-dependence of the Hall effect in Hg-Ba-Ca-Cu-O thin films
- 2004Tailoring the transport properties of YBa2Cu3O7-δ thin films by light-ion irradiation
- 2002Electrical properties, texture, and microstructure of vicinal YBa2Cu3O7-δ thin filmscitations
- 2001Pulsed-laser deposition and characterization of high-temperature superconducting films
- 2000Double sign reversal of the vortex Hall effect in YBa2Cu3O7-δ thin films in the strong pinning limit of low magnetic fieldscitations
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article
Modification and nano-patterning of high-Tc superconducting thin films by masked ion beam irradiation
Abstract
Ion irradiation of the high-temperature superconductor (HTS) YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub> (Y-123) creates different types of defects depending on ion mass, energy and dose. Irradiation with helium ions of moderate energy (75 keV) primarily creates point defects. We measure in situ the modification of electrical transport properties of Y-123 thin films (thickness 310 nm) during ion irradiation. The He ions penetrate thin films and produce collision cascades with small lateral straggle that allow for patterning of nanostructures in the HTS layer. We present features smaller than 100 nm in size produced by masked ion beam irradiation of Y-123 films. Computer simulations indicate that nano-patterning of Y-123 thin films with 10 nm lateral resolution is achievable.