• Walukiewicz, Wladek
• Hawkridge, Michael
• Reichertz, Lothar A.
• Gherasoiu, Iulian

Abstract

Tunnel junctions are indispensable elements of multi junction solar cells. The fabrication of InGaN tunnel junctions requires the growth of degenerately doped n- and p-type layers. While highly doped n-type InGaN films have been demonstrated, the growth of degenerately p-doped InGaN films and the fabrication of high indium fraction InGaN tunnel junctions is still to be demonstrated. We present an investigation of the effect of Mg doping on the InGaN crystal properties over a large range of Mg fluxes and InN mole fractions in the range from 30% to 40%, using multiple characterization techniques. InGaN thin films were grown on GaN/sapphire templates and doped with Mg using plasma-assisted molecular beam epitaxy (PAMBE). We have found that the Mg concentration in the film increases linearly with the Mg beam equivalent pressure (BEP) at first, followed by a saturation at ∼4 x 10²¹ cm^-3 similar to the Mg doping behavior reported for GaN. The growth rate of the alloy changes by more than 50% with the changes in the surface availability of Mg. These effects can be explained through the saturation of the atomic sites available for incorporation in the case of Mg concentration saturation and by the passivation of the free nitrogen radicals in the case of the growth rate variation. The incorporation of In and Ga depends on the flux ratio (Φ_In + Φ_Ga)/(Φ_Mg) at the growth surface and it is shown that the decrease of this ratio below a threshold of ∼2000 causes the almost complete loss of In and the formation of a new quaternary wide band gap semiconductor alloy (InGaMg)N.

Topics

• impedance spectroscopy
• surface
• thin film
• semiconductor
• Nitrogen
• Indium