693.932 PEOPLE
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Boulet, Pascal
Institut Jean Lamour
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (54/54 displayed)
- 2024<i>In situ</i> tracking the phase change in metastable copper oxide thin film via thermal oxidation
- 2024In situ tracking the phase change in metastable copper oxide thin film via thermal oxidation
- 2024Hot melt extruded amorphous solid dispersions containing lumefantrine and Solupluscitations
- 2024High quality ZnMgAlO thin films by ultrasonic spray pyrolysis: tuning of optoelectronic properties for use as TCO, window layer, and buffer layer in all-oxide solar cellscitations
- 2024Integration of epitaxial LiNbO3 thin films with silicon technologycitations
- 2024ZnMgO Thin Films by Ultrasonic Spray Pyrolysis: Modulation of Optical and Electrical Properties by Post‐annealing and Magnesium Compositioncitations
- 2023Crystal structure and ferromagnetism of the CeFe$_9$Si$_4$ intermetallic compoundcitations
- 2023Investigation of PbSnTeSe High-Entropy Thermoelectric Alloy: A DFT Approachcitations
- 2023Crystal Structure and Ferromagnetism of the CeFe₉Si₄ Intermetallic Compoundcitations
- 2023Development of a two-step process based on ultrasonic spray pyrolysis to optimize optical and electrical properties of ZnMgAlO
- 2022Crystal structure, microstructure and electronic properties of a newly discovered ternary phase in the Al-Cr-Sc systemcitations
- 2022Investigation of PbSnTeSe High-Entropy Thermoelectric Alloy: A DFT Approachcitations
- 2022Effect of Pre-Oxidation on a Ti PVD Coated Ferritic Steel Substrate during High-Temperature Agingcitations
- 2022Theoretical and experimental approaches for the determination of functional properties of MgSnN 2 thin filmscitations
- 2022Theoretical and experimental approaches for the determination of functional properties of MgSnN2 thin filmscitations
- 2022Al 4 Ir: An Al–Ir Binary-Phase Superstructure of the Ni 2 Al 3 Typecitations
- 2021Structure–Property Relationships in Transition Metal Dichalcogenide Bilayers under Biaxial Strainscitations
- 2021Continuous manufacture of hydroxychloroquine sulfate drug products via hot melt extrusion technology to meet increased demand during a global pandemic: From bench to pilot scalecitations
- 2021Continuous manufacture of hydroxychloroquine sulfate drug products via hot melt extrusion technology to meet increased demand during a global pandemic: From bench to pilot scalecitations
- 2021Investigation of the (1 0 0) and (0 0 1) surfaces of the Al5Fe2 intermetallic compoundcitations
- 2021Structural model and spin-glass magnetism of the Ce 3 Au 13 Ge 4 quasicrystalline approximantcitations
- 2021Crystal Structure, Microstructure and Electronic Properties of a Newly Discovered Ternary Phase in the Al-Cr-Sc Systemcitations
- 2021Effect of the precursor concentration on structural properties of ZnO thin films by ultrasonic spray pyrolysis
- 2021Elaboration of high-transparency ZnO thin films by ultrasonic spray pyrolysis with fast growth ratecitations
- 2020Effect of Thermal Stresses Formed during Air Annealing of Amorphous Lanthanum Cuprate Thin Films Deposited on Silicon Substratecitations
- 2020Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applicationscitations
- 2020Paramagnetism and martensite stabilization of tensile strained NiTi shape memory alloycitations
- 2020Single crystal growth, crystal structure and surface characterisation of the binary phase Al45Cr7.citations
- 2019Probing the growth window of LaVO 3 perovskites thin films elaborated using magnetron co-sputteringcitations
- 2019Probing the growth window of LaVO3 perovskites thin films elaborated using magnetron co-sputteringcitations
- 2019Study of ignition and extinction of spruce glulam exposed to a radiative flux
- 2019Overview of the U3TGe5 family with T=Ti, V, Cr, Mn, Zr, Nb, Mo, Hf, Ta and W Nine new members, phase formation, stability, structural and physical properties and electronic structurescitations
- 2019A new ternary compound with the BGa8Ir4 structure type in the Al-Au-Ir systemcitations
- 2018Chemical environment and functional properties of highly crystalline ZnSnN2 thin films deposited by reactive sputtering at room temperaturecitations
- 2018Towards stoichiometric LiNbO3 epitaxial thin films grown by DLI-MOCVD
- 2018A voltammetric study on the atomic layer deposition of selenium and antimony on platinum electrode
- 2017Surface temperature of carbon composite samples during thermal degradationcitations
- 2017LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural propertiescitations
- 2017Comparison between Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves applications above 800°C in air atmospherecitations
- 2016Properties of rare-earth orthoferrites perovskite driven by steric hindrancecitations
- 2016Influence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition
- 2016Epitaxy, optical and acoustical properties of X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates
- 2016Residual stresses in X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates
- 2015Thermoelectric Properties of Sn-Containing Mg 2 Si Nanostructurescitations
- 2015On the Influence of the Sample Absorptivity when Studying the Thermal Degradation of Materialscitations
- 2015AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering for SAW applicationscitations
- 2015Tuning the structure and preferred orientation in reactively sputtered copper oxide thin filmscitations
- 2014Controlling the preferred orientation in sputter-deposited Cu2O thin films: Influence of the initial growth stage and homoepitaxial growth mechanismcitations
- 2014Testing epitaxial Co1.5Fe1.5Ge(001) electrodes in MgO-based magnetic tunnel junctionscitations
- 2013Isothermal α″ formation in β metastable titanium alloyscitations
- 2013Magnetic and electronic properties of NpCo2: Evidence for long-range magnetic ordercitations
- 2013Cation size effect on the thermochromic properties of rare earth cobaltites RECoO3 (RE: La, Nd, Sm)citations
- 2013Combined Temperature and Deformation Measurement During Glass Forming in a Real Scale Setupcitations
- 2011Experimental Investigation of Radiation Emitted by Optically Thin to Optically Thick Wildland Flamescitations
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article
Integration of epitaxial LiNbO3 thin films with silicon technology
Abstract
International audience ; Development of bulk acoustic wave filters with ultra-wide passbands and operating at high frequencies for 5th and 6th generation telecommunication applications and micro-scale actuators, energy harvesters and sensors requires lead-free piezoelectric thin films with high electromechanical coupling and compatible with Si technology. In this paper, the epitaxial growth of 36°Y-X and 30°X-Y LiNbO3 films by direct liquid injection chemical vapor deposition on Si substrates by using epitaxial SrTiO3 layer, grown by molecular beam epitaxy, has been demonstrated. The stability of the interfaces and chemical interactions between SrTiO3, LiNbO3 and Si were studied experimentally and by thermodynamical calculations. The experimental conditions for pure 36°Y-X orientation growth have been optimized. The piezoelectricity of epitaxial 36°Y-LiNbO3/SrTiO3/Si films was confirmed by means of piezoelectric force microscopy measurements and the ferroelectric domain inversion was attained at 85 kV.cm-1 as expected for the nearly stoichiometric LiNbO3. According to the theoretical calculations, 36°Y-X LiNbO3 films on Si could offer an electromechanical coupling of 24.4% for thickness extension excitation of bulk acoustic waves and a comparable figure of merit of actuators and vibrational energy harvesters to that of standard PbZr1-xTixO3 films.