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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Bartasyte, Ausrine
STMicroelectronics (United Kingdom)
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Topics
Publications (29/29 displayed)
- 2024Integration of epitaxial LiNbO3 thin films with silicon technologycitations
- 2023Dispersion of surface elastic waves on Z-LiNbO3 films on Z-sapphirecitations
- 2023Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materialscitations
- 2023Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materialscitations
- 2023Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materialscitations
- 2023Correlated disorder by defects clusters in LiNbO3 single crystals after crys-tal ion-slicingcitations
- 2022A smart battery free system for wireless condition monitoring using piezoelectric energy harvestercitations
- 2022A low-cost alternative lead-free piezoelectric LiNbO3 films for micro-energy sources
- 2022Dy-Doped BiFeO3 thin films: piezoelectric and bandgap tuning
- 2022Self-Poled Heteroepitaxial Bi_(1-x) Dy_x FeO_3 Films with Promising Pyroelectric Propertiescitations
- 2022Self‐Poled Heteroepitaxial Bi(1−x)DyxFeO3 Films with Promising Pyroelectric Propertiescitations
- 2021LiNbO3 films – A low-cost alternative lead-free piezoelectric material for vibrational energy harvesterscitations
- 2021A Self-Powered and Battery-Free Vibrational Energy to Time Converter for Wireless Vibration Monitoringcitations
- 2021A Self-Powered and Battery-Free Vibrational Energy to Time Converter for Wireless Vibration Monitoringcitations
- 2021Highly coupled and low frequency vibrational energy harvester using lithium niobate on siliconcitations
- 2020New Approach of Interdigitated Transducers Engineering for High-Temperature Surface Acoustic Wave Sensors
- 2020Piezoelectric Ba and Ti co-doped BiFeO<sub>3</sub> textured films: selective growth of solid solutions or nanocompositescitations
- 2018Towards stoichiometric LiNbO3 epitaxial thin films grown by DLI-MOCVD
- 2018Low-loss rutile TiO2 films for nanophotonics applications
- 2018Piezoelectric and pyroelectric energyharvesting from lithium niobate films
- 2018Piezoelectric and pyroelectric energy harvesting from lithium niobate films
- 2016LiNbO3-an alternative lead-free material for vibrational energy harvesters
- 2016Influence of plasma treatments and SnO2 alloying on the conductive properties of epitaxial Ga2O3 films deposited on C-sapphire by chemical vapor deposition
- 2016Epitaxy, optical and acoustical properties of X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates
- 2016Residual stresses in X-, Y-, and Z-axis oriented LiNbO3 thin films on sapphire substrates
- 2015Can LiNbO3 be an alternative for PZT in vibrational energy harvesters?
- 2014Effect of microwave remote plasma and radiofrequency plasma on the photoluminescence of (0001) epitaxial ZnO filmscitations
- 2013Ferroelectric nanodomains in epitaxial PbTiO3 films grown on SmScO3 and TbScO3 substratescitations
- 2006Ferroelectric PbTiO3 films grown by pulsed liquid injection metalorganic chemical vapour deposition
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article
Integration of epitaxial LiNbO3 thin films with silicon technology
Abstract
International audience ; Development of bulk acoustic wave filters with ultra-wide passbands and operating at high frequencies for 5th and 6th generation telecommunication applications and micro-scale actuators, energy harvesters and sensors requires lead-free piezoelectric thin films with high electromechanical coupling and compatible with Si technology. In this paper, the epitaxial growth of 36°Y-X and 30°X-Y LiNbO3 films by direct liquid injection chemical vapor deposition on Si substrates by using epitaxial SrTiO3 layer, grown by molecular beam epitaxy, has been demonstrated. The stability of the interfaces and chemical interactions between SrTiO3, LiNbO3 and Si were studied experimentally and by thermodynamical calculations. The experimental conditions for pure 36°Y-X orientation growth have been optimized. The piezoelectricity of epitaxial 36°Y-LiNbO3/SrTiO3/Si films was confirmed by means of piezoelectric force microscopy measurements and the ferroelectric domain inversion was attained at 85 kV.cm-1 as expected for the nearly stoichiometric LiNbO3. According to the theoretical calculations, 36°Y-X LiNbO3 films on Si could offer an electromechanical coupling of 24.4% for thickness extension excitation of bulk acoustic waves and a comparable figure of merit of actuators and vibrational energy harvesters to that of standard PbZr1-xTixO3 films.