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Koskinen, Tomi
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Publications (4/4 displayed)
- 2024Thermal Boundary Conductance of Direct Bonded Aluminum Nitride to Silicon Interfacescitations
- 2023Atomic layer deposition of Zr-sandwiched ZnO thin films for transparent thermoelectricscitations
- 2021Thermoelectric Characteristics of InAs Nanowire Networks Directly Grown on Flexible Plastic Substratescitations
- 2019Thermal characterization of III–V semiconductor core-shell nanowire arrays ; III–V-puolijohdeydinkuorinanolankahilojen lämpöominaisuuksien karakterisointi
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article
Atomic layer deposition of Zr-sandwiched ZnO thin films for transparent thermoelectrics
Abstract
<p>Atomic layer deposited (ALD) transparent thermoelectric materials enable the introduction of energy harvesting and sensing devices onto surfaces of various shapes and sizes in imperceptible manner. Amongst these materials, ZnO has shown promising results in terms of both thermoelectric and optical characteristics. The thermoelectric performance of ZnO can be further optimized by introducing extrinsic doping, to the realization of which ALD provides excellent control. Here, we explore the effects of sandwiching of ZrO<sub>2</sub> layers with ZnO on glass substrates. The room-temperature thermoelectric power factor is maximised at 116μW m<sup>−1</sup> K<sup>−2</sup> with samples containing a 2% nominal percentage of ZrO<sub>2</sub>. The addition of ZrO<sub>2</sub> layers is further shown to reduce the thermal conductivity, resulting in a 20.2% decrease from the undoped ZnO at 2% doping. Our results contribute to increasing the understanding of the effects of Zr inclusion in structural properties and growth of ALD ZnO, as well as the thermal and thermoelectric properties of Zr-doped ZnO films in general.</p>