| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Vahl, Alexander
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2024ITO-TiO2 Heterojunctions on Glass Substrates for Photocatalytic Gold Growth Along Pattern Edges
- 2024Early-stage silver growth during sputter deposition on SiO2 and polystyrene - Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMScitations
- 2024Early-stage silver growth during sputter deposition on SiO$_2$ and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMScitations
- 2024Co‐sputtering of A Thin Film Broadband Absorber Based on Self‐Organized Plasmonic Cu Nanoparticlescitations
- 2023Co‐sputtering of A Thin Film Broadband Absorber Based on Self‐Organized Plasmonic Cu Nanoparticles
- 2022A thin-film broadband perfect absorber based on plasmonic copper nanoparticlescitations
- 2021Heterostructure-based devices with enhanced humidity stability for H2 gas sensing applications in breath tests and portable batteries
- 2021Heterostructure-based devices with enhanced humidity stability for H2 gas sensing applications in breath tests and portable batteriescitations
- 2020Single CuO/Cu2O/Cu Microwire Covered by a Nanowire Network as a Gas Sensor for the Detection of Battery Hazardscitations
- 2020Facile fabrication of semiconducting oxide nanostructures by direct ink writing of readily available metal microparticles and their application as low power acetone gas sensorscitations
- 2019Electron Beam Effects on Oxide Thin Films—Structure and Electrical Property Correlationscitations
- 2019The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin filmscitations
- 2019Electron beam effects on oxide thin films - structure and electrical property correlationscitations
- 2019Pathways to Tailor Photocatalytic Performance of TiO2 Thin Films Deposited by Reactive Magnetron Sputteringcitations
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article
The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films
Abstract
Morphology is a critical parameter for various thin film applications, influencing properties like wetting, catalytic performance and sensing efficiency. In this work, we report on the impact of oxygen partial flow on the morphology of ceramic thin films deposited by pulsed DC reactive magnetron sputtering. The influence of O2/Ar ratio was studied on three different model systems, namely Al2O3, CuO and TiO2. The availability of oxygen during reactive sputtering is a key parameter for a versatile tailoring of thin film morphology over a broad range of nanostructures. TiO2 thin films with high photocatalytic performance (up to 95% conversion in 7 h) were prepared, exhibiting a network of nanoscopic cracks between columnar anatase structures. In contrast, amorphous thin films without such crack networks and with high resiliency to crystallization even up to 950 °C were obtained for Al2O3. Finally, we report on CuO thin films with well aligned crystalline nanocolumns and outstanding gas sensing performance for volatile organic compounds as well as hydrogen gas, showing gas responses up to 35% and fast response in the range of a few seconds.