693.932 PEOPLE
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Petrov, R. H. | Madrid |
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| Azevedo, Nuno Monteiro |
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Quandt, Eckhard
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (49/49 displayed)
- 2024SMA Film-Based Elastocaloric Cooling Devicescitations
- 2023Structural characterisation and degradation of Mg–Li thin films for biodegradable implantscitations
- 2023Power Optimization of TiNiHf/Si Shape Memory Microactuatorscitations
- 2023Shape Memory Alloy Thin Film Auxetic Structurescitations
- 2023Thin-Film Superelastic Alloys for Stretchable Electronicscitations
- 2023Bistable Actuation Based on Antagonistic Buckling SMA Beamscitations
- 2022AlScN-Based SAW Magnetic Field Sensor for Isolated Closed-Loop Hysteretic Current Control of Switched-Mode Power Converterscitations
- 2022Imaging of Love Waves and Their Interaction with Magnetic Domain Walls in Magnetoelectric Magnetic Field Sensors
- 2021Roadmap on Magnetoelectric Materials and Devicescitations
- 2021Origami-inspired thin-film shape memory alloy devicescitations
- 2021Coherent Precipitates as a Condition for Ultra-Low Fatigue in Cu-Rich Ti53.7Ni24.7Cu21.6 Shape Memory Alloyscitations
- 2020Integration of AlN piezoelectric thin films on ultralow fatigue TiNiCu shape memory alloyscitations
- 2020Correlation between phase compatibility and efficient energy conversion in Zr-doped Barium Titanatecitations
- 2019Contactless monitoring of temperature change in cutting inserts by application of hard coatings and ferromagnetic film sensor phasescitations
- 2019The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin filmscitations
- 2018Wide Band Low Noise Love Wave Magnetic Field Sensor Systemcitations
- 2018Magnetron-Sputtered, Biodegradable FeMn Foils: The Influence of Manganese Content on Microstructure, Mechanical, Corrosion, and Magnetic Propertiescitations
- 2018Cobalt Gradient Evolution in Sputtered TiNiCuCo Films for Elastocaloric Coolingcitations
- 2018Phase engineering and supercompatibility of shape memory alloyscitations
- 2017Mesoscale simulation of elastocaloric cooling in SMA filmscitations
- 2017Magnetron Sputtering as a Fabrication Method for a Biodegradable Fe32Mn Alloycitations
- 2017Functional NiTi grids for in situ straining in the TEMcitations
- 2016Combining Sensor and Protective Functionalities in Ferromagnetic Nanocomposite Thin Films for Applications in Harsh Environmentscitations
- 2016Martensite adaption through epitaxial nano transition layers in TiNiCu shape memory alloyscitations
- 2015Magnetron Sputtering a New Fabrication Method of Iron Based Biodegradable Implant Materialscitations
- 2015Magnetron Sputtering a New Fabrication Method of Iron Based Biodegradable Implant Materialscitations
- 2015Micropatterned freestanding magnetron sputtered Mg-alloy scaffoldscitations
- 2013Revisiting magnetic stripe domains - Anisotropy gradient and stripe asymmetrycitations
- 2013Dual wavelength magneto-optical imaging of magnetic thin filmscitations
- 2013Mechanical properties and corrosion behaviour of freestanding, precipitate-free magnesium WE43 thin filmscitations
- 2011Mechanical Behaviour and Corrosion Performance of Thin Film Magnesium WE Alloyscitations
- 2011High aspect ratio free standing ZnO-magnetostrictive mesoscale cylindrical magnetoelectric core shell compositecitations
- 2010Using thin film stress for nanoscaled sensors
- 2010Development towards MSM active FePd thick films
- 2010The ferromagnetic shape memory system Fe-Pd-Cu
- 2009Local setting of magnetic anisotropy in amorphous films by Co ion implantationcitations
- 2009Local stress engineering of magnetic anisotropy in soft magnetic thin filmscitations
- 2007New materials for micro-scale sensors and actuators:an engineering reviewcitations
- 2005Magnetic anisotropy and domain patterning of amorphous films by He-ion irradiationcitations
- 2004Magnetostrictive LC-circuits as mechanical sensors
- 2003Stress sensors based on magnetostrictive thin films
- 2003Magnetically tunable SAW-resonatorcitations
- 2002Thin film magnetostrictive actuation of a 2D scanning silicon micro-mirror
- 2002Permeameter zur Messung hochfrequenter und magnetoelastischer Eigenschaften dünner magnetischer Schichten
- 2002Berührungslose magnetoelastische Sensoren
- 2001Wireless tyre sensors based on amorphous magneto-elastic materialscitations
- 2001A novel optical scanner with integrated two-dimensional magnetostrictive actuation and two-dimensional piezoresistive detectioncitations
- 2001Rare earth transition metal thin films and devicescitations
- 2000Magnetic multilayers for sensor and actuator applications
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article
The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films
Abstract
Morphology is a critical parameter for various thin film applications, influencing properties like wetting, catalytic performance and sensing efficiency. In this work, we report on the impact of oxygen partial flow on the morphology of ceramic thin films deposited by pulsed DC reactive magnetron sputtering. The influence of O2/Ar ratio was studied on three different model systems, namely Al2O3, CuO and TiO2. The availability of oxygen during reactive sputtering is a key parameter for a versatile tailoring of thin film morphology over a broad range of nanostructures. TiO2 thin films with high photocatalytic performance (up to 95% conversion in 7 h) were prepared, exhibiting a network of nanoscopic cracks between columnar anatase structures. In contrast, amorphous thin films without such crack networks and with high resiliency to crystallization even up to 950 °C were obtained for Al2O3. Finally, we report on CuO thin films with well aligned crystalline nanocolumns and outstanding gas sensing performance for volatile organic compounds as well as hydrogen gas, showing gas responses up to 35% and fast response in the range of a few seconds.