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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Kuronen, Antti
University of Helsinki
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2024Dependence between glass transition and plasticity in amorphous aluminum oxide : A molecular dynamics studycitations
- 2024Polycrystalline silicon, a molecular dynamics study : I. Deposition and growth modescitations
- 2024Polycrystalline silicon, a molecular dynamics study: Part I --- Deposition and growth modescitations
- 2024Dependence between glass transition and plasticity in amorphous aluminum oxidecitations
- 2024Effect of radiation defects on the early stages of nanoindentation tests in bcc Fe and Fe-Cr alloyscitations
- 2024Polycrystalline silicon, a molecular dynamics study: Part II --- Grains, grain boundaries and their structurecitations
- 2023Ultrasound-based surface sampling in immersion for mass spectrometrycitations
- 2022Identifying Regions-of-Interest and Extracting Gold from PCBs Using MHz HIFUcitations
- 2022Effect of radiation defects on the early stages of nanoindentation tests in bcc Fe and Fe-Cr alloyscitations
- 2016Interatomic Fe-H potential for irradiation and embrittlement simulationscitations
- 2015Surface segregation in chromium-doped NiCr alloy nanoparticles and its effect on their magnetic behaviorcitations
- 2015Segregation, precipitation, and alpha-alpha ' phase separation in Fe-Cr alloyscitations
- 2009From multiply twinned to fcc nanoparticles via irradiation-induced transient amorphizationcitations
- 2009Low energy cluster deposition of nanoalloyscitations
Places of action
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article
Polycrystalline silicon, a molecular dynamics study: Part II --- Grains, grain boundaries and their structure
Abstract
<jats:title>Abstract</jats:title><jats:p>Polysilicon (Poly-Si) is an excellent material for use in microelectronic devices, both in electrical and mechanical applications. Its mechanical and electrical properties are widely adjustable, its processing technology is compatible with existing microcircuit manufacturing technology, and its availability and recyclability are at a high level. Here, we focus on investigating the properties of poly-Si that distinguish it from other forms of silicon, that is, grains, grain boundaries, and the conditions and treatments that determine grain and grain boundary properties. Starting from the molecular dynamics simulations of the deposition of thin poly-Si films under different growth conditions we study the properties of the films, grains, and grain boundaries as a function of growth time, growth temperature, and post-annealing. We aim to get data and information that will form the essential basis for future research on the electrical properties of poly-Si.&#xD;&#xD;The main results are: (i) the effect of post-annealing on the distribution of the grain size and grain boundary thickness (ii) the distribution of the grain orientations, and (iii) the density of the 3- and 5-bonded atoms as a function of deposition temperature.</jats:p>