| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Haye, Emile
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (28/28 displayed)
- 2024Revealing wear mechanisms of coated shafts in low-speed journal bearings immersed in liquid Lead-Bismuth Eutectic (LBE)
- 2024Porous microstructures of thin films sputtered by magnetron sputtering onto carbon nanomaterial surface
- 2024Changes in chemical composition of TixAl1−xN coatings immersed in oxygen-saturated Lead–Bismuth Eutectic at low and moderate temperatures (250 °C ≤ T ≤ 410 °C)citations
- 2023Vein pattern vs. columnar fracture shape in Cu-Zr thin film metallic glassescitations
- 2023Tuning the physico-chemical properties of SnSe films by pulse electrodepositioncitations
- 2023Thermo-kinetic approach to the crystallization mechanism of thermochromic SmNiO3 thin films: An in situ study in air-annealingcitations
- 2023Thermo-kinetic approach to the crystallization mechanism of thermochromic SmNiO 3 thin films:An in situ study in air-annealingcitations
- 2023Vein pattern vs. columnar fracture shape in Cu-Zr thin film metallic glasses:Driving force and mechanismcitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO2 nanocatalysts for toluene degradationcitations
- 2022Theoretical and experimental approaches for the determination of functional properties of MgSnN 2 thin filmscitations
- 2022A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatingscitations
- 2022A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatingscitations
- 2022Theoretical and experimental approaches for the determination of functional properties of MgSnN2 thin filmscitations
- 2022Composite alginate membranes with dispersed MQFP hard magnet network as a new concept for highly efficient pervaporative dehydration of ethanol/water mixturecitations
- 2022Investigation of the Antibacterial Properties of Silver-Doped Amorphous Carbon Coatings Produced by Low Pressure Magnetron Assisted Acetylene Dischargescitations
- 2022Influence of oxygen co-implantation on germanium out-diffusion and nanoclustering in SiO2/Si filmscitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO 2 nanocatalysts for toluene degradationcitations
- 2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental depositioncitations
- 2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental depositioncitations
- 2020Using ammonia for reactive magnetron sputtering, a possible alternative to HiPIMS?citations
- 2020Formable chromium nitride coatings for proton exchange membrane fuel cell stainless steel bipolar platescitations
- 2019Probing the growth window of LaVO 3 perovskites thin films elaborated using magnetron co-sputteringcitations
- 2019Defective Pt–Ni/graphene nanomaterials by simultaneous or sequential treatments of organometallic precursors by low-pressure oxygen plasmacitations
- 2018Chemical environment and functional properties of highly crystalline ZnSnN2 thin films deposited by reactive sputtering at room temperaturecitations
- 2018Nitrogen redistribution in annealed LaFeO x N y thin films investigated by FTIR spectroscopy and EELS mappingcitations
- 2018Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitridecitations
- 2017LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural propertiescitations
- 2016Properties of rare-earth orthoferrites perovskite driven by steric hindrancecitations
Places of action
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article
Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition
Abstract
In this paper, a previously established 3D multi-scale simulation chain of plasma deposition process, based on a combination of a direct simulation Monte Carlo (gas phase) algorithm and a kinetic Monte Carlo (kMC) (film growth) code, is improved by the addition of a particle-in-cell Monte Carlo collision algorithm in order to take into account and clarify the role of charged particles. The kinetic Monte Carlo code is also extended with a binary collision approximation algorithm to handle charged particles. This modelling strategy is successfully applied to the growth of TiO2 thin films by means of reactive magnetron sputtering. In order to highlight the effects of negative oxygen ions, two substrate locations are selected: one in the median plane of the targets and another one off the median plane. The model efficiently predicts the densities and fluxes of both charged and neutral particles towards the substrate. Typical results such as particle densities, the discharge current density and ion flux onto the target, and the various substrate locations are calculated. The angular distribution and energy distribution of all involved particles are sampled at these very same substrate locations and the nanoscale modelling (NASCAM) code, implementing the kMC approach, uses these results to explain the morphology of the experimentally deposited coatings. The changes throughout the transition from metallic deposition to stoichiometric TiO2 of the columnar structure of the deposited films is explained by the suppression of the atom diffusion on the growing film due to Ti oxidation. Moreover, the high-energy negative atomic oxygen ions originating from the targets are identified as the origin of the abnormally low inclination of the columnar structure experimentally observed for the oxide mode coatings. Measurements of the normalized energy flux (energy per deposited atom) are experimentally investigated to support and highlight the important role of energetic particles during film growth.