| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Gardeniers, Han
University of Twente
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (26/26 displayed)
- 2024Alternative nano-lithographic tools for shell-isolated nanoparticle enhanced Raman spectroscopy substrates
- 2024Alternative nano-lithographic tools for shell-isolated nanoparticle enhanced Raman spectroscopy substratescitations
- 2023Fabrication of homogeneous shell-isolated sers substrates for catalytic applications
- 20233D‐Architected Alkaline‐Earth Perovskitescitations
- 2022Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumescitations
- 2022Additive Manufacturing of 3D Luminescent ZrO2:Eu3+ Architecturescitations
- 2022Vacuum-driven assembly of electrostatically levitated microspheres on perforated surfacescitations
- 2020Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithographycitations
- 2020Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etchingcitations
- 2020Spatial Segregation of Microspheres by Rubbing-Induced Triboelectrification on Patterned Surfacescitations
- 2018Three-dimensional fractal geometry for gas permeation in microchannelscitations
- 2018Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etchingcitations
- 2012Production and characterization of micro- and nano-features in biomedical alumina and zirconia ceramics using a tape casting routecitations
- 2008On the resilience of PDMS microchannels after violent optical breakdown microbubble cavitation
- 2007Integrated electrochemical sensor array for on-line monitoring of yeast fermentationscitations
- 2007Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110)citations
- 2006Fabrication of microfluidic networks with integrated electrodescitations
- 2006Monitoring of yeast cell concentration using a micromachnined impedance sensorcitations
- 2005Monitoring of yeast cell concentration using a micromachined impedance sensor
- 2003A low hydraulic capacitance pressure sensor for integration with a micro viscosity detectorcitations
- 2002Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactionscitations
- 2002Integrated Micro- and Nanofluidics: Silicon Revisitedcitations
- 2002Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation
- 2001Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connectionscitations
- 2001Failure mechanisms of pressurized microchannels, model, and experimentscitations
- 2000Failure mechanisms of pressurized microchannels, model and experiments
Places of action
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article
Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes
Abstract
<jats:title>Abstract</jats:title><jats:p>In this paper a processing technique for sapphire is presented which combines laser-induced amorphization and subsequent selective wet etching of amorphized sapphire as well as anisotropic wet etching of single-crystalline sapphire (<jats:italic>α</jats:italic>-Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub>). Using this technique, microstructures can be realized on the surface and in the bulk of sapphire substrates. By focusing ultra-short laser pulses inside sapphire, its structure can be transformed from crystalline into amorphous. The modified material can be selectively removed using etchants, such as hydrofluoric acid or potassium hydroxide (KOH), solely dissolving the amorphized part. In this work, however, an etchant consisting of a standard solution of sulphuric acid and phosphoric acid (96 vol% H<jats:sub>2</jats:sub>SO<jats:sub>4</jats:sub>: 85 vol% H<jats:sub>3</jats:sub>PO<jats:sub>4</jats:sub>, 3:1 vol%) at 180 °C is utilized. This method allows the realization of structures which are impossible to achieve when using conventional etchants which solely dissolve the amorphized sapphire. Ultrashort pulsed laser irradiation (230 fs) is used in this study as starting point for the subsequent anisotropic etching to form microstructures on the surface or in the bulk of sapphire that are terminated by characteristic crystal planes. In particular, the appearance of etching-induced patterns formed by stacks of rhombohedra is shown for structures below the surface, whereas triangular pits are achieved in surface processing.</jats:p>