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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Larsen, Niels Bent
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (22/22 displayed)
- 2023Contrast-enhanced ultrasound imaging using capacitive micromachined ultrasonic transducerscitations
- 2022High Resolution Dual Material Stereolithography for Monolithic Microdevicescitations
- 2022Immobilization of Active Antibodies at Polymer Melt Surfaces during Injection Molding
- 20213D printed calibration micro-phantoms for super-resolution ultrasound imaging validationcitations
- 20193D Printed Calibration Micro-phantoms for Validation of Super-Resolution Ultrasound Imagingcitations
- 2015Hydrogen silsesquioxane mold coatings for improved replication of nanopatterns by injection moldingcitations
- 2013Injection molding of high aspect ratio sub-100 nm nanostructurescitations
- 2013Designing CAF-adjuvanted dry powder vaccinescitations
- 2012A Platform for Functional Conductive Polymers
- 2012Micropatterning of Functional Conductive Polymers with Multiple Surface Chemistries in Registercitations
- 2011Enhanced transduction of photonic crystal dye lasers for gas sensing via swelling polymer filmcitations
- 2011Injection molded nanofluidic chips: Fabrication method and functional tests using single-molecule DNA experimentscitations
- 2011Microwave assisted click chemistry on a conductive polymer filmcitations
- 2011Selective gas sensing for photonic crystal lasers
- 2010Fast prototyping of injection molded polymer microfluidic chipscitations
- 2010Nanostructures for all-polymer microfluidic systemscitations
- 2010“Electro-Click” on Conducting Polymer Films
- 2008Novel polymer coatings based on plasma polymerized 2-methoxyethyl acrylate
- 2008Conductive Polymer Functionalization by Click Chemistrycitations
- 2007Micropatterning of a stretchable conductive polymer using inkjet printing and agarose stampingcitations
- 2006On the Injection Molding of Nanostructured Polymer Surfacescitations
- 2001Surface morphology of PS-PDMS diblock copolymer filmscitations
Places of action
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article
Injection molding of high aspect ratio sub-100 nm nanostructures
Abstract
We have explored the use of mold coatings and optimized processing conditions to injection mold high aspect ratio nanostructures (height-to-width >1) in cyclic olefin copolymer (COC). Optimizing the molding parameters on uncoated nickel molds resulted in slight improvements in replication quality as described by height, width and uniformity of the nanoscopic features. Use of a mold temperature transiently above the polymer glass transition temperature (Tg) was the most important factor in increasing the replication fidelity. Surface coating of the nickel molds with a fluorocarbon-containing thin film (FDTS) greatly enhanced the quality of replicated features, in particular at transient mold temperatures above Tg. Injection molding using the latter mold temperature regime resulted in a bimodal distribution of pillar heights, corresponding to either full or very poor replication of the individual pillars. The poorly replicated structures on nickel molds with or without FDTS coatings all appeared fractured. We investigated the underlying mechanism in a macroscopic model system and found reduced wetting and strongly decreased adhesion of solidified COC droplets on nickel surfaces after coating with FDTS. Reduced adhesion forces are consistent with lowered friction that reduces the risk of fracturing the nanoscopic pillars during demolding. Optimized mold surface chemistry and associated injection molding conditions permitted the fabrication of square arrays of 40 nm wide and 107 nm high (aspect ratio >2.5) pillars on a 200 nm pitch.