| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Supiot, Philippe
Université de Lille
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2024Degradation processes of brominated flame retardants dispersed in high impact polystyrene under UV–visible radiationcitations
- 2024Degradation of Decabromodiphenyl Ether Dispersed in Poly (Acrylo-Butadiene-Styrene) Using a Rotatory Laboratory Pilot Under UV-Visible Irradiationcitations
- 2023Degradation processes of brominated flame retardants dispersed in high impact polystyrene under UV–visible radiationcitations
- 2023Electron Beam Processing as a Promising Tool to Decontaminate Polymers Containing Brominated Flame Retardantscitations
- 2023Temperature and frequency dependence on dielectric permittivity and electrical conductivity of recycled Liquid Crystalscitations
- 2023Plasma-modified wood sawdust waste for the removal of reactive blue II anionic dye from aqueous solutioncitations
- 2022Enhanced thermal stability of biobased crosslinked poly (isobornylacrylate-co-2-ethylhexylacrylate) copolymerscitations
- 2022Enhanced thermal stability of biobased crosslinked poly (isobornylacrylate-co-2-ethylhexylacrylate) copolymerscitations
- 2021Effect of structure on the glass transition temperatures of linear and crosslinked poly(isobornylacrylate-co-isobutylacrylate)citations
- 2020Modification of hydroxyapatite surface properties by electron irradiationcitations
- 2018Analysis of dynamic mechanical properties of photochemically crosslinked poly(isobornylacrylate-co-isobutylacrylate) applying WLF and Havriliak-Negami modelscitations
- 2010Materials chemistry for catalysis : Coating of catalytic oxides on metallic foamscitations
- 2009Preparation and multi-characterization of plasma polymerized allylamine filmscitations
- 2008ppTMDS as a new polymer technology for a high throughput bio-MEMS designcitations
- 2008Preparation and characterization of thin organosilicon films deposited on SPR chipcitations
- 2006Growth and modification of organosilicon films in PECVD and remote afterglow reactorscitations
Places of action
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article
ppTMDS as a new polymer technology for a high throughput bio-MEMS design
Abstract
The development of more complex biochips in terms of functionality requires some technological evolutions. A high frequency biological micro-electro-mechanical-system dedicated to biological analysis is a typical case of this requirement for providing compatibility between high frequency propagation and microfluidic circulation. Mixed fabrication technologies using silicon and polymers appear to be a good alternative. We have developed a promising deposition process of an organosilicon polymer by remote afterglow plasma technology, also called plasma polymerized tetramethyldisiloxane (ppTMDS). This technique allows us to obtain high deposition rate values in the range of 160 Å s−1 and a thick layer up to 140 µm without any crack. Moreover, this process is compatible with high throughput microelectronic designs and it is done near room temperature. This last point is very interesting for further development of surface bio-functionalization, for example. We have characterized this siloxane polymer by physico-chemical analysis. The roughness has been optimized, thus allowing the realization of high frequency waveguides. The ppTMDS permittivity presents a low dispersive characteristic and constitutes one of the best low-loss polymers up to 1 THz.