| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Lucas, Stéphane
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (33/33 displayed)
- 2024Revealing wear mechanisms of coated shafts in low-speed journal bearings immersed in liquid Lead-Bismuth Eutectic (LBE)
- 2024Changes in chemical composition of TixAl1−xN coatings immersed in oxygen-saturated Lead–Bismuth Eutectic at low and moderate temperatures (250 °C ≤ T ≤ 410 °C)citations
- 2023Vein pattern vs. columnar fracture shape in Cu-Zr thin film metallic glassescitations
- 2023Tailoring Mechanical Properties of a-C:H:Cr Coatings
- 2023Tailoring Mechanical Properties of a-C:H:Cr Coatings
- 2023Finite Element Mesh Generation for Nano-scale Modeling of Tilted Columnar Thin Films for Numerical Simulationcitations
- 2023Vein pattern vs. columnar fracture shape in Cu-Zr thin film metallic glasses:Driving force and mechanismcitations
- 2022Effect of variation in oxygen concentration in static Pb–Bi eutectic on long-term corrosion performance of Al-alloyed austenitic steels at 500 °Ccitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO2 nanocatalysts for toluene degradationcitations
- 2022A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatingscitations
- 2022A mechanistic approach of oxidation resistance, structural and mechanical behaviour of TiAlN coatingscitations
- 2022Investigation of the Antibacterial Properties of Silver-Doped Amorphous Carbon Coatings Produced by Low Pressure Magnetron Assisted Acetylene Dischargescitations
- 2022Low-pressure plasma process for the dry synthesis of cactus-like Au-TiO 2 nanocatalysts for toluene degradationcitations
- 2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental depositioncitations
- 2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental depositioncitations
- 2021On the relationship between the plasma characteristics:the microstructure and the optical properties of reactively sputtered TiO2 thin filmscitations
- 2021On the relationship between the plasma characteristics, the microstructure and the optical properties of reactively sputtered TiO2 thin filmscitations
- 2020Using ammonia for reactive magnetron sputtering, a possible alternative to HiPIMS?citations
- 2020Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactorcitations
- 2020Low gas consumption fabrication of 3 He solid targets for nuclear reactionscitations
- 2020Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicalscitations
- 2020Technological challenges and progress in nanomaterials plasma surface modification – A reviewcitations
- 2019Low gas consumption fabrication of 3He solid targets for nuclear reactionscitations
- 2019Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modelingcitations
- 2019Characterization of water‑based paints containing titanium dioxide or carbon black as manufactured nanomaterials before and after atomizationcitations
- 2019Correlation of structural and optical properties using virtual materials analysiscitations
- 2018Can the normalized energy flux at the substrate control the microstructure of reactively sputtered TiO2 thin films ?
- 2018Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitridecitations
- 2018TiOx deposited by magnetron sputtering: a joint modelling and experimental studycitations
- 2018Plasma Treatment of Metal Oxide Nanoparticles:Development of Core–Shell Structures for a Better and Similar Dispersibilitycitations
- 2015Multiscale simulations of the early stages of the growth of graphene on coppercitations
- 2014On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique anglescitations
- 2010Surface phenomena involved in the formation of Co nanoparticles on amorphous Carbon and SiO2 deposited by magnetron sputteringcitations
Places of action
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article
On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles
Abstract
The formation of the porous structure in dc magnetron sputtered amorphous silicon thin films at low temperatures is studied when using helium and/or argon as the processing gas. In each case, a-Si thin films were simultaneously grown at two different locations in the reactor which led to the assembly of different porous structures. The set of four fabricated samples has been analyzed at the microstructural level to elucidate the characteristics of the porous structure under the different deposition conditions. With the help of a growth model, we conclude that the chemical nature of the sputter gas not only affects the sputtering mechanism of Si atoms from the target and their subsequent transport in the gaseous/plasma phase towards the film, but also the pore formation mechanism and dynamics. When Ar is used, pores emerge as a direct result of the shadowing processes of Si atoms, in agreement with Thornton's structure zone model. The introduction of He produces, in addition to the shadowing effects, a new process where a degree of mobility results in the coarsening of small pores. Our results also highlight the influence of the composition of sputtering gas and tilt angles (for oblique angle deposition) on the formation of open and/or occluded porosity.