| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mølhave, Kristian S.
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (18/18 displayed)
- 2024Microheater Controlled Crystal Phase Engineering of Nanowires Using In Situ Transmission Electron Microscopycitations
- 2024Microheater Controlled Crystal Phase Engineering of Nanowires Using In Situ Transmission Electron Microscopycitations
- 2024Operando Electron Microscopy and Impedance Analysis of Solid Oxide Electrolysis and Fuel Cellscitations
- 2021Development of high-temperature electrochemical TEM and its application on solid oxide electrolysis cells
- 2021Initiation and Progression of Anisotropic Galvanic Replacement Reactions in a Single Ag Nanowirecitations
- 2020Complex Aerosol Characterization by Scanning Electron Microscopy Coupled with Energy Dispersive X-ray Spectroscopycitations
- 2018Influence of Cetyltrimethylammonium Bromide on Gold Nanocrystal Formation Studied by in Situ Liquid Cell Scanning Transmission Electron Microscopycitations
- 2017Direct bonding of ALD Al2O3 to silicon nitride thin filmscitations
- 2016Controlling nanowire growth through electric field-induced deformation of the catalyst dropletcitations
- 2016In-Situ Transmission Electron Microscopy on Operating Electrochemical Cells
- 2016Effect of Synthesis Parameters on the Structure and Magnetic Properties of Magnetic Manganese Ferrite/Silver Composite Nanoparticles Synthesized by Wet Chemistry Methodcitations
- 2015Feasibility of the development of reference materials for the detection of Ag nanoparticles in food: neat dispersions and spiked chicken meatcitations
- 2011Titanium tungsten coatings for bioelectrochemical applications
- 2010Customizable in situ TEM devices fabricated in freestanding membranes by focused ion beam millingcitations
- 2008Epitaxial Integration of Nanowires in Microsystems by Local Micrometer Scale Vapor Phase Epitaxycitations
- 2003Soldering of Nanotubes onto Microelectrodescitations
- 2003Solid gold nanostructures fabricated by electron beam depositioncitations
- 2001Customizable nanotweezers for manipulation of free-standing nanostructurescitations
Places of action
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article
Customizable in situ TEM devices fabricated in freestanding membranes by focused ion beam milling
Abstract
Nano- and microelectromechanical structures for in situ operation in a transmission electron microscope (TEM) were fabricated with a turnaround time of 20 min and a resolution better than 100 nm. The structures are defined by focused ion beam (FIB) milling in 135 nm thin membranes of single crystalline silicon extending over the edge of a pre-fabricated silicon microchip. Four-terminal resistance measurements of FIB-defined nanowires showed at least two orders of magnitude increase in resistivity compared to bulk. We show that the initial high resistance is due to amorphization of silicon, and that current annealing recrystallizes the structure, causing the electrical properties to partly recover to the pristine bulk resistivity. In situ imaging of the annealing process revealed both continuous and abrupt changes in the crystal structure, accompanied by instant changes of the electrical conductivity. The membrane structures provide a simple way to design electron-transparent nanodevices with high local temperature gradients within the field of view of the TEM, allowing detailed studies of surface diffusion processes. We show two examples of heat-induced coarsening of gold on a narrow freestanding bridge, where local temperature gradients are controlled via the electrical current paths. The separation of device processing into a one-time batch-level fabrication of identical, generic membrane templates, and subsequent device-specific customization by FIB milling, provides unparalleled freedom in device layout combined with very short effective fabrication time. This approach significantly speeds up prototyping of nanodevices such as resonators, actuators, sensors and scanning probes with state-of-art resolution.