| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Federici, Stefania
University of Brescia
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2016Energetics of surface confined ferritin during iron loadingcitations
- 2013Sensitive determination of the Young's modulus of thin films by polymeric microcantileverscitations
- 2013Sensitive determination of the Young's modulus of thin films by polymeric microcantileverscitations
- 2013Metal fractionation in soils and assessment of environmental contamination in Vallecamonica, Italycitations
Places of action
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article
Sensitive determination of the Young's modulus of thin films by polymeric microcantilevers
Abstract
A method for the highly sensitive determination of the Young's modulus of TiO 2 thin films exploiting the resonant frequency shift of a SU-8 polymer microcantilever (MC) is presented. Amorphous TiO 2 films with different thickness ranging from 10 to 125 nm were grown at low temperature (90 °C) with subnanometer thickness resolution on SU-8 MC arrays by means of atomic layer deposition. The resonant frequencies of the MCs were measured before and after coating and the elastic moduli of the films were determined by a theoretical model developed for this purpose. The Young's modulus of thicker TiO 2 films (>75 nm) was estimated to be about 110 GPa, this value being consistent with the value of amorphous TiO 2 . On the other hand we observed a marked decrease of the Young's modulus for TiO 2 films with a thickness below 50 nm. This behavior was found not to be related to a decrease of the film mass density, but to surface effects according to theoretical predictions on size-dependent mechanical properties of nano- and microstructures.