| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mazierska, Janina
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2021Complex Permittivity of Mixtures of Sand With Aqueous NaCl Solutions Measured at 2.5 GHzcitations
- 2011Microwave and RF methods of contactless mapping of the sheet resistance and the complex permittivity of conductive materials and semiconductorscitations
- 2006Temperature dependence of complex permittivity of planar microwave materialscitations
- 2006Measurements of conductivity of thin gold films at microwave frequencies employing resonant techniquescitations
- 2005Dielectric Properties of Yttrium Vanadate Crystals from 15 K to 295 Kcitations
- 2005Precise microwave characterisation of low loss dielectrics
- 2004A cryogenic post dielectric resonator for precise microwave characterization of planar dielectric materials for superconducting circuitscitations
- 2004Complex permittivity measurements at variable temperatures of low loss dielectric substrates employing split post and single post dielectric resonatorscitations
- 2004Microwave characterization of (La,Sr)(AlTa)O3 using TE011 mode dielectric resonator
- 2004Precise microwave characterization of MgO substrates for HTS circuits with superconducting post dielectric resonatorcitations
- 2003Measurements of loss tangent and relative permittivity of LTCC ceramics at varying temperatures and frequenciescitations
- 2003Microwave Properties of Yttrium Vanadate Crystals at Cryogenic Temperatures
Places of action
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article
Microwave and RF methods of contactless mapping of the sheet resistance and the complex permittivity of conductive materials and semiconductors
Abstract
Split-post dielectric-resonator and eddy current methods have been compared for the sheet resistance and resistivity mapping of semiconductor wafers and thin conducting films deposited on semi-insulating substrates. It has been shown that both methods give similar measurement results for the sheet resistance values that lie within their measurement ranges. Split-post dielectric-resonator and eddy current techniques can be used for measurements on samples having similar size. Measurements that employ a split-post dielectric resonator allow measurement of about three orders of magnitude larger sheet resistance values (especially for thin films) than the eddy current method but they are more complicated than the RF method and require additional microwave equipment to measure the Q-factors and the resonance frequencies.