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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Petersen, Paul Michael
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (8/8 displayed)
- 2022A Tunable Hyperspectral Imager for Detection and Quantification of Marine Biofouling on Coated Surfacescitations
- 2020Micro-integrated high-power narrow-linewidth external-cavity tapered diode laser at 808 nmcitations
- 2017Effective optimization of surface passivation on porous silicon carbide using atomic layer deposited Al2O3citations
- 2017Effective optimization of surface passivation on porous silicon carbide using atomic layer deposited Al2O3citations
- 2017Investigation of saturation effects in ceramic phosphors for laser lightingcitations
- 2016Surface passivation of nano-textured fluorescent SiC by atomic layer deposited TiO2citations
- 2016Surface passivation of nano-textured fluorescent SiC by atomic layer deposited TiO2citations
- 2016Investigation of the effect of UV-LED exposure conditions on the production of vitamin D in pig skincitations
Places of action
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article
Surface passivation of nano-textured fluorescent SiC by atomic layer deposited TiO2
Abstract
Nano-textured surfaces have played a key role in optoelectronic materials to enhance the light extraction efficiency. In this work, morphology and optical properties of nano-textured SiC covered with atomic layer deposited (ALD) TiO2 were investigated. In order to obtain a high quality surface for TiO2 deposition, a three-step cleaning procedure was introduced after RIE etching. The morphology of anatase TiO2 indicates that the nano-textured substrate has a much higher surface nucleated grain density than a flat substrate at the beginning of the deposition process. The corresponding reflectance increases with TiO2 thickness due to increased surface diffuse reflection. The passivation effect of ALD TiO2 thin film on the nano-textured fluorescent 6H-SiC sample was also investigated and a PL intensity improvement of 8.05% was obtained due to the surface passivation.