| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Semmar, Nadjib
Université d'Orléans
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (34/34 displayed)
- 2024Thin film mediated and direct observation of LIPSS on soda-lime glass by femtosecond IR laser beamcitations
- 2024Nanostructured Oxide (SnO2, FTO) Thin Films for Energy Harvesting: A Significant Increase in Thermoelectric Power at Low Temperaturecitations
- 2024Influence of thin film for LIPSS formation on soda-lime glass using SHG femtosecond laser beam
- 2023Study of CO2 Laser-induced Thermal Stress Mechanisms on Decorative Soda-lime Glasscitations
- 2023Effect of Nanographene Coating on the Seebeck Coefficient of Mesoporous Siliconcitations
- 2022LIPSS formation by picosecond laser irradiation of magnetron sputtered gadolinium-doped ceria thin films
- 2022LIPSS formation by picosecond laser irradiation of magnetron sputtered gadolinium-doped ceria thin films
- 2022Laser texturing of PVD thin-film ceramics for micro-battery applications
- 2022Nano/micro surface structuring of CGO/YSZ oxide thin films by picosecond laser beam
- 2021LIPSS formation by picosecond laser irradiation of magnetron sputtered CGO thin films
- 2021LIPSS formation by picosecond laser irradiation of magnetron sputtered CGO thin films
- 2021Comparative study of the picosecond laser surface texturing of YSZ and CGO on YSZ films for electrochemical cells applications
- 2021Polystyrene Thin Films Nanostructuring by UV Femtosecond Laser Beam: From One Spot to Large Surfacecitations
- 2019Inkjet-printed aluminum-doped zinc oxide nanostructures
- 2018Laser-based setup for simultaneous measurement of the Seebeck coefficient and electrical conductivity for bulk and thin film thermoelectricscitations
- 2018Graphene - mesoporous Si or Ge nanocomposites for thermoelectric applications
- 2017Nanostructuring of titanium oxide thin film by UV femtosecond laser beam: from one spot to large surfacescitations
- 2017Laser sintering of silver-based inkjet printed electrodes
- 2017Growth and properties of calcium cobaltite thin films by pulsed-laser deposition
- 2016Thermoelectric properties of thin film materials : influence of the substrate and contact resistance
- 2015Oxide-based thermoelectric micro-generators for ambiant energy harvesting
- 2015Experimental and numerical analysis of crack-free DPSS laser dicing of borosilicate glasscitations
- 2014Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputteringcitations
- 2014Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputteringcitations
- 2014Titanium oxide thin film growth by magnetron sputtering: Total energy flux and its relationship with the phase constitutioncitations
- 2013Energy transferred to the substrate surface during reactive magnetron sputtering of aluminum in Ar/O2 atmospherecitations
- 2013Plasma-based growth and functionalization of CNT from first steps to technological applications
- 2013IR emission from the target during plasma magnetron sputter depositioncitations
- 2013Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes
- 2013Thermal and electrical characterization of thin carbon nanotubes films
- 2012Carbon nanotube growth from metallic nanoparticles deposited by pulsed-laser deposition on different substratescitations
- 2012Molecular dynamics simulations of cluster growth in nanostructured materials
- 2008‘Numerical simulation of Si nanosecond laser annealing by COMSOLMultiphysics : case of IR semi transparent medium
- 2004Laser treatment of a steel surface in ambient aircitations
Places of action
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article
Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputtering
Abstract
We report on thermal conductivity measurements of aluminum nitride (AlN) films using the fast pulsed photo-thermal technique. The films were deposited by high-power impulse magnetron sputtering with different thicknesses ranging from 1000 to 8000 nm on (1 0 0) oriented silicon substrates. The films were characterized by x-ray diffraction (XRD), Raman spectroscopy, profilometry, scanning electron microscopy and atomic force microscopy. The XRD measurements showed that AlN films were textured along the (0 0 2) direction. Moreover, x-ray rocking curve measurements indicated that the crystalline quality of AlN was improved with the increase in film thickness. The thermal conductivities of the samples were found to rapidly increase when the film thickness increased up to 3300 nm and then showed a tendency to remain constant. A thermal boundary resistance as low as 8 × 10−9 W−1 K m2 and a thermal conductivity as high as 250 ± 50 W K−1 m−1 were obtained for the AlN films, at room temperature. This high thermal conductivity value is close to that of an AlN single crystal and highlights the potential of these films as a dielectric material for thermal management.