693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cattan, Eric
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (20/20 displayed)
- 2023Modeling and control of smart material based actuator using energetic macroscopic representation
- 2022Study of a microsystem based on a nitinol wire for biomedical applications; characterization in air and in a liquid medium
- 2020Soft microelectromechanical systems and artificial muscles based on electronically conducting polymers
- 2019Dual sensing and actuation of ultrathin conducting polymer transducers
- 2019Bidirectional model for ultrathin pedot-based trilayer transducers
- 2019Integration of pedot:pss-based transducers in soft microchips
- 2018Non-linear dynamic modeling of ultrathin conducting polymer actuators including inertial effectscitations
- 2018Non-linear dynamic modeling of ultrathin conducting polymer actuators
- 2018Ultrathin electrochemically driven conducting polymer actuators: fabrication and electrochemomechanical characterizationcitations
- 2018Ultrathin electrochemically driven conducting polymer actuators: fabrication and electrochemomechanical characterizationcitations
- 2017Microfabricated PEDOT trilayer actuators: synthesis, characterization, and modelingcitations
- 2016Synergetic PEDOT degradation during a reactive ion etching processcitations
- 2006A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformationcitations
- 2005A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation
- 2005Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvestingcitations
- 2005The effect of LaNiO3 bottom electrode thickness on ferroelectric and dielectric properties of (100) oriented PbZr0.53Ti0.47O3 filmscitations
- 2003Epitaxial growth and ferroelectric properties of (115) SrBi2Nb2O9 thin films deposited by pulsed laser deposition on epitaxial (111) Pt electrodecitations
- 2002Influence of the microstructure and of an ION beam etching on the domain propagation in PZT thin filmscitations
- 2002Ferroelectric (116) SrBi2Nb2O9 thin films epitaxially grown by pulsed laser deposition on epitaxial (110) Pt/(110) SrTiO3 electrodecitations
- 2001Ferroelectric and piezoelectric properties of Nb doped PZT filmscitations
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article
A Bi-stable Micro-machined Piezoelectric Transducer for Mechanical to Electrical Energy Transformation
Abstract
The development of micro-machined ultrasonic transducers on silicon opens new appli-cation fields for Si-based acoustic sensors operating in air or in liquids. In this work, wedescribe the fabrication of piezoelectric micro-machined ultrasonic transducers (pMUT)first dedicated to ultrasonic imaging applications that may be used as a mechanical toelectrical energy transformer for energy scavenging purpose [1]. We report on the fab-rication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUTs) firstdesigned for acoustic applications and on tests of these devices as scavenging energyexperiment.