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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Singh, Chandra Bhal
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Topics
Publications (13/13 displayed)
- 2022Control of Layering in Aurivillius Phase Nanocomposite Thin Films and Influence on Ferromagnetism and Optical Absorptioncitations
- 2020Impact of Samarium on the growth of epitaxial Bismuth ferrite thin films
- 2020Impact of Samarium on the Growth of Epitaxial Bismuth Ferrite Thin Filmscitations
- 2020Nanocomposites with Three-Dimensional Architecture and Impact on Photovoltaic Effectcitations
- 2019Synthesis and dielectric characterization of BaZrNb2O8 high temperature piezoelectric ceramics
- 2019Structural, dielectric, semiconducting and optical properties of high-energy ball milled YFeO3 nano-particles
- 2018Development of Textured Electrode, Index Matching Layer and Nanostructured Materials for Light Trapping inside Photovoltaic devicescitations
- 2018Effect of grain size on structural and dielectric properties of barium titanate piezoceramics synthesized by high energy ball millingcitations
- 2014Effect of Substrate Temperature Variation and Tartarization on micro-Structural and Optical Properties of Pulsed DC Sputtered Hydrogenated ZnO: Al Filmscitations
- 2013Application of SixNy:Hz (SiN) as index matching layer in a-Si:H thin film solar cellscitations
- 2013Raman and FTIR Studies on PECVD Grown Ammonia-Free Amorphous Silicon Nitride Thin Films for Solar Cell Applicationscitations
- 2013Optical and Structural Properties of Ammonia-Free Amorphous Silicon Nitride Thin Films for Photovoltaic Applicationscitations
- 2012Ion-induced secondary electrons emission measurement from MgO films deposited on multiwalled carbon nanotubescitations
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article
Optical and Structural Properties of Ammonia-Free Amorphous Silicon Nitride Thin Films for Photovoltaic Applications
Abstract
ABSTRACT Hydrogenated amorphous silicon nitride (a-SiNx:H) thin films have been deposited through the green chemistry route using silane (SiH4) and nitrogen (N2) as process gases with SiH4 flow being variable and N2 flow being constant without the use of pollutant and corrosive ammonia (NH3) by the plasma-enhanced chemical vapor deposition technique at 13.56 MHz. Fourier transform infrared spectroscopy analysis shows various possible vibrational modes of Si-H, Si-N, and N-H bonds present in the film. Raman spectroscopy is performed on these samples to calculate volume fractions corresponding to amorphous phases present in the a-SiNx:H films. The refractive index (η) values are calculated using Swanepoel's method, which are in the range of 2.89 to 3.17. The thickness of the deposited films has been evaluated using transmission spectra. Absorption coefficient and band gap (E g) values are obtained from optical absorption studies. An increase in the E g and a decrease in the η value have been observed for th...