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Korpas, Przemysław
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article
Automatic Split Post Dielectric Set-up for Measurements of Substrates and Thin Conducting and Ferroelectric Films
Abstract
We have developed an inexpensive computer controlled microwave oscillator system that enables quick and automatic measurements of the complex permittivity with a specific split post dielectric resonator (SPDR). It is based on a phase-locked loop Microwave Voltage Controlled Oscillator intended for the Q-factor and the resonance frequency measurements of SPDR. Multipoint resonance curve fitting procedure allows accurate Q-factor determination. The only external information that is necessary for the complex permittivity determination of a dielectric substrate or a ferroelectric film is the thickness of the sample under test. We compare the complex permittivity measurement results on few dielectric samples employing Vector Network Analyser and our measurements set-up. We also present measurement results of the sheet resistance and resistivity of epitaxial GaN films deposited on sapphire substrates.