693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Primetzhofer, Daniel
Uppsala University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (66/66 displayed)
- 2024Temporally-resolved decomposition of Ti 0.12 Al 0.21 B 0.67 thin films at 1000 °Ccitations
- 2024Magnetic metamaterials by ion-implantationcitations
- 2024Temporally-resolved decomposition of Ti0.12Al0.21B0.67 thin films at 1000°Ccitations
- 2024Phase formation and electrical properties of reactively sputtered Fe1-x O thin films
- 2024Ion-beam assisted synthesis and thermal oxidation of TiN thin films combined with in-situ, depth-resolved characterization using MeV ionscitations
- 2023Unraveling the superlattice effect for hexagonal transition metal diboride coatingscitations
- 2023A contactless single-step process for simultaneous nanoscale patterning and cleaning of large-area graphenecitations
- 2023High-temperature oxidation resistance of ternary and quaternary Cr-(Mo)-Si-B2-z coatings-Influence of Mo additioncitations
- 2023Effect of growth temperature and atmosphere exposure time on impurity incorporation in sputtered Mg, Al, and Ca thin filmscitations
- 2023Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electronscitations
- 2023Yttrium incorporation in Cr2AlC : On the metastable phase formation and decomposition of (Cr,Y)2AlC MAX phase thin filmscitations
- 2023Yttrium incorporation in Cr$_2$AlC: On the metastable phase formation and decomposition of (Cr,Y)$_2$AlC MAX phase thin filmscitations
- 2023Quaternary diborides-improving the oxidation resistance of TiB2 +/- z coatings by disilicide alloyingcitations
- 2023Corundum-structured AlCrNbTi oxide film grown using high-energy early-arriving ion irradiation in high-power impulse magnetron sputteringcitations
- 2023Yttrium incorporation in Cr2AlC: On the metastable phase formation and decomposition of (Cr,Y)2AlC MAX phase thin filmscitations
- 2023Thin films sputter-deposited from EUROFER97 in argon and deuterium atmosphere : Material properties and deuterium retentioncitations
- 2023Compositional defects in a MoAlB MAB phase thin film grown by high-power pulsed magnetron sputteringcitations
- 2023Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin filmscitations
- 2023Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin filmscitations
- 2023Yttrium incorporation in Cr2AlC : On the metastable phase formation and decomposition of (Cr,Y)(2)AlC MAX phase thin filmscitations
- 2023Yttrium incorporation in Cr2AlC: On the metastable phase formation and decomposition of (Cr,Y)(2)AlC MAX phase thin filmscitations
- 2022Non-reactive HiPIMS deposition of NbCx thin films : Effect of the target power density on structure-mechanical propertiescitations
- 2022On the interplay between microstructure, residual stress and fracture toughness of (Hf-Nb-Ta-Zr)C multi-metal carbide hard coatingscitations
- 2022Circumventing Thermodynamic Constraints in Nucleation-Controlled Crystallization of Al2TiO5-Based Chemical Vapor Deposition Coatingscitations
- 2022Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Filmscitations
- 2022Synthesis of ferromagnetic thin films and engineering of their magnetic properties by Fe ion implantation in polycrystalline Pdcitations
- 2021Orthorhombic Ta3-xN5-yOy thin films grown by unbalanced magnetron sputtering : The role of oxygen on structure, composition, and optical propertiescitations
- 2021Influence of Ta on the oxidation resistance of WB2-z coatingscitations
- 2021Opportunities of combinatorial thin film materials design for the sustainable development of magnesium-based alloyscitations
- 2021Age hardening in superhard ZrB2-rich Zr1-xTaxBy thin filmscitations
- 2021Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1-x (Me = Hf, Nb, Mo, or Cr) Filmscitations
- 2021In-situ nanoscale characterization of composition and structure during formation of ultrathin nickel silicidecitations
- 2021Growth of two-dimensional WS2 thin films by reactive sputteringcitations
- 2021Toxicity of stainless and mild steel particles generated from gas–metal arc welding in primary human small airway epithelial cellscitations
- 2021In-situ measurement of diffusion and surface segregation of W and Ta in bare and W-coated EUROFER97 during thermal annealingcitations
- 2021Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin filmscitations
- 2021Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
- 2021Effect of nitrogen vacancies on the growth, dislocation structure, and decomposition of single crystal epitaxial (Ti1-xAlx)N-y thin filmscitations
- 2021Systematic compositional analysis of sputter-deposited boron-containing thin filmscitations
- 2020Preferential Orientation of Photochromic Gadolinium Oxyhydride Filmscitations
- 2020Preferential Orientation of Photochromic Gadolinium Oxyhydride Filmscitations
- 2020Oxidation behaviour of V2AlC MAX phase coatingscitations
- 2020The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputteringcitations
- 2020Boron Concentration Induced Co-Ta-B Composite Formation Observed in the Transition from Metallic to Covalent Glassescitations
- 2020Boron Concentration Induced Co-Ta-B Composite Formation Observed in the Transition from Metallic to Covalent Glassescitations
- 2020Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin filmscitations
- 2020Effect of nitrogen content on microstructure and corrosion resistance of sputter-deposited multicomponent (TiNbZrTa)N-x filmscitations
- 2020A Proposal for a Composite with Temperature-Independent Thermophysical Properties : HfV2-HfV2O7citations
- 2020Effect of nitrogen content on microstructure and corrosion resistance of sputter-deposited multicomponent (TiNbZrTa)Nx filmscitations
- 2020Spinodal decomposition of reactively sputtered (V$_{0.64}$Al$_{0.36}$)$_{0.49}$N$_{0.51}$ thin filmscitations
- 2019Remote Tracking of Phase Changes in Cr2AlC Thin Films by In-situ Resistivity Measurementscitations
- 2019Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputteringcitations
- 2019Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputteringcitations
- 2019Atomic layer deposition of amorphous tin-gallium oxide filmscitations
- 2018Cation/Anion-based electrochemical degradation and rejuvenation of electrochromic nickel oxide filmscitations
- 2017Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineeringcitations
- 2017Compositional and morphological analysis of FeW films modified by sputtering and heatingcitations
- 2017A Solution-Doped Polymer Semiconductor : Insulator Blend for Thermoelectricscitations
- 2016Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineeringcitations
- 2016Correlative theoretical and experimental investigation of the formation of AIYB(14) and competing phasescitations
- 2016A Solution-Doped Polymer Semiconductor:Insulator Blend for Thermoelectricscitations
- 2015Development of W–SiO2 and Nb–TiO2 solar absorber coatings for combined heat and power systems at intermediate operation temperaturescitations
- 2015Development of W–SiO2 and Nb–TiO2 solar absorber coatings for combined heat and power systems at intermediate operation temperaturescitations
- 2014Crystal Phase Transitions in the Shell of PbS/CdS Core/Shell Nanocrystals Influences Photoluminescence Intensitycitations
- 2014Tuning the Localized Surface Plasmon Resonance in Cu2-xSe Nanocrystals by Postsynthetic Ligand Exchangecitations
- 2013Tuning the magnetic properties of metal oxide nanocrystal heterostructures by cation exchangecitations
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article
Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons
Abstract
A recently presented chemical vapor deposition (CVD) method involves using plasma electrons as reducing agents for deposition of metals. The plasma electrons are attracted to the substrate surface by a positive substrate bias. Here, we present how a standard quartz crystal microbalance (QCM) system can be modified to allow applying a DC bias to the QCM sensor to attract plasma electrons to it and thereby also enable in situ growth monitoring during the electron-assisted CVD method. We show initial results from mass gain evolution over time during deposition of iron films using the biased QCM and how the biased QCM can be used for process development and provide insight into the surface chemistry by time-resolving the CVD method. Post-deposition analyses of the QCM crystals by cross-section electron microscopy and high-resolution x-ray photoelectron spectroscopy show that the QCM crystals are coated by an iron-containing film and thus function as substrates in the CVD process. A comparison of the areal mass density given by the QCM crystal and the areal mass density from elastic recoil detection analysis and Rutherford backscattering spectrometry was done to verify the function of the QCM setup. Time-resolved CVD experiments show that this biased QCM method holds great promise as one of the tools for understanding the surface chemistry of the newly developed CVD method. ; Funding Agencies|Swedish Research Council (VR) [2015-03803, 2019-05055]; Swedish Foundation for Strategic Research [15-0018]; Lam Research Corporation