People | Locations | Statistics |
---|---|---|
Naji, M. |
| |
Motta, Antonella |
| |
Aletan, Dirar |
| |
Mohamed, Tarek |
| |
Ertürk, Emre |
| |
Taccardi, Nicola |
| |
Kononenko, Denys |
| |
Petrov, R. H. | Madrid |
|
Alshaaer, Mazen | Brussels |
|
Bih, L. |
| |
Casati, R. |
| |
Muller, Hermance |
| |
Kočí, Jan | Prague |
|
Šuljagić, Marija |
| |
Kalteremidou, Kalliopi-Artemi | Brussels |
|
Azam, Siraj |
| |
Ospanova, Alyiya |
| |
Blanpain, Bart |
| |
Ali, M. A. |
| |
Popa, V. |
| |
Rančić, M. |
| |
Ollier, Nadège |
| |
Azevedo, Nuno Monteiro |
| |
Landes, Michael |
| |
Rignanese, Gian-Marco |
|
Zhang, Chi
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2024Nanostructure and interfacial mechanical properties of PEG/cellulose nanocomposites studied with molecular dynamicscitations
- 2024Anisotropic Deformation in a Polymer Slab Subjected to Fluid Adsorptioncitations
- 2023Phytic Acid-Silica System for Imparting Fire Retardancy in Wood Compositescitations
- 2022Adaptive duplication and genetic diversification of protein kinase R contribute to the specificity of bat-virus interactionscitations
- 2022Growth-microstructure-thermal property relations in AlN thin filmscitations
- 2022Unravelling thermal-mechanical effects on microstructure evolution under superplastic forming conditions in a near alpha titanium alloycitations
- 2020Moisture-induced crossover in the thermodynamic and mechanical response of hydrophilic biopolymercitations
- 2020Disentangling heat and moisture effects on biopolymer mechanicscitations
- 2019Wood–moisture relationships studied with molecular simulations: methodological guidelinescitations
- 2018Quadratic and cubic hyperpolarizabilities of nitro-phenyl/-naphthalenyl/-anthracenyl alkynyl complexescitations
- 2018Using modeling to understand the hygromechanical and hysteretic behavior of the S2 cell wall layer of woodcitations
- 2015Syntheses, Electrochemical, Linear Optical, and Cubic Nonlinear Optical Properties of Ruthenium-Alkynyl-Functionalized Oligo(phenylenevinylene) Starscitations
- 2015Pressure, stress, and strain distribution in the double-stage diamond anvil cellcitations
- 2010Highly sensitive bend sensor based on Bragg grating in eccentric core polymer fibercitations
- 2007Recent developments of Bragg gratings in PMMA and TOPAS polymer optical fibers
- 2007Recent developments of Bragg gratings in PMMA and TOPAS polymer optical fibers
Places of action
Organizations | Location | People |
---|
article
Growth-microstructure-thermal property relations in AlN thin films
Abstract
<p>AlN thin films are enabling significant progress in modern optoelectronics, power electronics, and microelectromechanical systems. The various AlN growth methods and conditions lead to different film microstructures. In this report, phonon scattering mechanisms that impact the cross-plane (κz; along the c-axis) and in-plane (κr; parallel to the c-plane) thermal conductivities of AlN thin films prepared by various synthesis techniques are investigated. In contrast to bulk single crystal AlN with an isotropic thermal conductivity of ∼330 W/m K, a strong anisotropy in the thermal conductivity is observed in the thin films. The κz shows a strong film thickness dependence due to phonon-boundary scattering. Electron microscopy reveals the presence of grain boundaries and dislocations that limit the κr. For instance, oriented films prepared by reactive sputtering possess lateral crystalline grain sizes ranging from 20 to 40 nm that significantly lower the κr to ∼30 W/m K. Simulation results suggest that the self-heating in AlN film bulk acoustic resonators can significantly impact the power handling capability of RF filters. A device employing an oriented film as the active piezoelectric layer shows an ∼2.5× higher device peak temperature as compared to a device based on an epitaxial film.</p>