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| Naji, M. |
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Campbell, Ian
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Publications (5/5 displayed)
- 2022Experimental borosilicate bioactive glasses: Pulp cells cytocompatibility and mechanical characterizationcitations
- 2021Molybdenum carbonitride deposited by plasma atomic layer deposition as a Schottky contact to gallium nitridecitations
- 2020Ion release characterization in phase separated borosilicate glass powderscitations
- 2020Gallium‐ and Cerium‐Doped Phosphate Glasses with Antibacterial Properties for Medical Applicationscitations
- 2019Ga and Ce ion-doped phosphate glass fibres with antibacterial properties and their composite for wound healing applicationscitations
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article
Molybdenum carbonitride deposited by plasma atomic layer deposition as a Schottky contact to gallium nitride
Abstract
<jats:p>Molybdenum carbonitride films prepared by plasma enhanced atomic layer deposition were studied for use as Schottky contacts to n-type gallium nitride. Deposited using bis(tertbutylimino)bis(dimethylamino)molybdenum and a remote plasma N2/H2 plasma, the diodes capped with Ti/Au displayed excellent rectifying behavior with a barrier height of 0.87 ± 0.01 eV and an ideality factor of 1.02 ± 0.01 after annealing at 600 °C in N2. These characteristics surpass those of pure metal nitride Schottky diodes, possibly due to work function engineering due to the incorporation of C and use of a remote plasma to avoid process-induced defects. According to x-ray photoelectron spectroscopy and energy-dispersive x-ray spectroscopy, the film composition is approximately MoC0.3N0.7. Grazing incidence x-ray diffraction and plan-view transmission electron microscopy selected area electron diffraction are consistent with a rock salt structure with a lattice parameter of 0.42 nm.</jats:p>