| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Schubert, Eva
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Topics
Publications (13/13 displayed)
- 2024In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2018Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniquescitations
- 2016Anisotropy, band-to-band transitions, phonon modes, and oxidation properties of cobalt-oxide core-shell slanted columnar thin filmscitations
- 2015Structural and optical properties of cobalt slanted nanopillars conformally coated with few-layer graphenecitations
- 2015Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometrycitations
- 2012Nanomagnetic skyrmionscitations
- 2012Optical properties of cobalt slanted columnar thin films passivated by atomic layer depositioncitations
- 2012Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Filmscitations
- 2011Length scales of interactions in magnetic, dielectric, and mechanical nanocompositescitations
- 2007Sub‐Wavelength Antireflection Coatings From Nanostructure Sculptured Thin Filmscitations
- 2005Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrorscitations
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article
Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques
Abstract
<jats:p>WO3 thin films were grown by atomic layer deposition and spectroscopic ellipsometry data gathered in the photon energy range of 0.72–8.5 eV, and from multiple samples were utilized to determine the frequency dependent complex-valued isotropic dielectric function for WO3. We employ a critical-point model dielectric function analysis and determine a parameterized set of oscillators and compare the observed critical-point contributions with the vertical transition energy distribution found within the band structure of WO3 calculated by the density functional theory. The surface roughness was investigated using atomic force microscopy, and compared with the effective roughness as seen by the spectroscopic ellipsometry.</jats:p>