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article
Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes
Abstract
We present thermal detectors based on 40?nm-thick straintuned single crystalline silicon membranes shaped into aheater area supported by narrow n- and p-doped beams,which also operate as a thermocouple. The electro-thermalcharacterization of the devices reveals a noiseequivalent power of 13 pW/Hz1/2 and a thermal timeconstant of 2.5?ms. The high sensitivity of the devicesis due to the high Seebeck coefficient of 0.39?mV/K andreduction of thermal conductivity of the Si beams fromthe bulk value. The performance enables fast andsensitive detection of low levels of thermal power andinfrared radiation at room temperature. The devicesoperate in the Johnson-Nyquist noise limit of thethermocouple, and the performance improvement towards theoperation close to the temperature fluctuation limit isdiscussed.