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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Varpula, Aapo
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2018Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Methodcitations
- 2018Silicon nano-thermoelectric detectors for for sensing and instrumentation applications
- 2018Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samplescitations
- 2018Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method
- 2017Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranescitations
- 2015Nondestructive characterization of fusion and plasma activated wafer bonding using mesa and recess structurescitations
- 2011Electrical properties of granular semiconductors : modelling and experiments on metal-oxide gas sensorscitations
- 2011A compact quantum statistical model for the ballistic nanoscale MOSFETscitations
- 2010Magnetic polarons in ferromagnetic semiconductor single-electron transistorscitations
- 2010Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensorscitations
- 2010Modelling of dc characteristics for granular semiconductorscitations
- 2010Small-signal analysis of granular semiconductorscitations
- 2010Modeling of transient electrical characteristics for granular semiconductorscitations
Places of action
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article
Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes
Abstract
We present thermal detectors based on 40?nm-thick straintuned single crystalline silicon membranes shaped into aheater area supported by narrow n- and p-doped beams,which also operate as a thermocouple. The electro-thermalcharacterization of the devices reveals a noiseequivalent power of 13 pW/Hz1/2 and a thermal timeconstant of 2.5?ms. The high sensitivity of the devicesis due to the high Seebeck coefficient of 0.39?mV/K andreduction of thermal conductivity of the Si beams fromthe bulk value. The performance enables fast andsensitive detection of low levels of thermal power andinfrared radiation at room temperature. The devicesoperate in the Johnson-Nyquist noise limit of thethermocouple, and the performance improvement towards theoperation close to the temperature fluctuation limit isdiscussed.