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| Azevedo, Nuno Monteiro |
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Berre, Martine Le
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Publications (3/3 displayed)
- 2023How ALD deposition analysis can help PVD deposition process!
- 2017Metallic nanoparticle-based strain sensors elaborated by atomic layer depositioncitations
- 2017Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer depositioncitations
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article
Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition
Abstract
Platinum nanoparticle-based strain gauges are elaborated by means of atomic layer deposition on flexible polyimide substrates. Their electro-mechanical response is tested under mechanical bending in both buckling and conformational contact configurations. A maximum gauge factor of 70 is reached at a strain level of 0.5%. Although the exponential dependence of the gauge resistance on strain is attributed to the tunneling effect, it is shown that the majority of the junctions between adjacent Pt nanoparticles are in a short circuit state. Finally, we demonstrate the feasibility of an all-plastic pressure sensor integrating Pt nanoparticle-based strain gauges in a Wheatstone bridge configuration.