| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Lammertink, Rob
University of Twente
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2024Streamer formation dynamics with mixed bacterial species: effects of cultivation conditions, hydrodynamics, and speciescitations
- 2024Mismatch and mix
- 2022Comparative assessment of hydrocarbon separation performance of bulky poly(urethane-urea)s toward rubbery membranescitations
- 2020Elucidating the effect of chain extenders substituted by aliphatic side chains on morphology and gas separation of polyurethanescitations
- 2019Association of hard segments in gas separation through polyurethane membranes with aromatic bulky chain extenderscitations
- 2017Fabrication of nanoporous graphene/polymer composite membranescitations
- 2015Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputteringcitations
- 2015Intrinsic Photocatalytic Assessment of Reactively Sputtered TiO2 Filmscitations
- 2011Hollow fiber ultrafiltration membranes with microstructured inner skincitations
- 2011Carbon nanofibers in catalytic membrane microreactorscitations
- 2010Microstructured hollow fibers for ultrafiltrationcitations
- 2010Shrinkage effects during polmer phase separation on microfabricated moldscitations
- 2010Surface texturing inside ceramic macro/micro channelscitations
- 2010Polymeric microsieves via phase separation microfabricationcitations
- 2009Microcontact Printing of Dendrimers, Proteins, and Nanoparticles by Porous Stampscitations
- 2009Micropatterned polymer films by vapor-induced phase separation using permeable moldscitations
- 2007Morphology and Microtopology of Cation-Exchange Polymers and the Origin of the Overlimiting Currentcitations
- 2006Polymeric microsieves produced by phase separation micromoldingcitations
- 2006Superhydrophobic Surfaces Having Two-Fold Adjustable Roughness Prepared in a Single Stepcitations
- 2005New replication technique for the fabrication of thin polymeric microfluidic devices with tunable porositycitations
- 2005Electrochemistry of Surface-Grafted Stimulus-Responsive Monolayers of Poly(ferrocenyldimethylsilane) on Goldcitations
Places of action
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article
Controlled formation of anatase and rutile TiO2 thin films by reactive magnetron sputtering
Abstract
We discuss the formation of TiO2 thin films via DC reactive magnetron sputtering. The oxygen concentration during sputtering proved to be a crucial parameter with respect to the final film structure and properties. The initial deposition provided amorphous films that crystallise upon annealing to anatase or rutile, depending on the initial sputtering conditions. Substoichiometric films (TiOx<2), obtained by sputtering at relatively low oxygen concentration, formed rutile upon annealing in air, whereas stoichiometric films formed anatase. This route therefore presents a formation route for rutile films via lower (<500 °C) temperature pathways. The dynamics of the annealing process were followed by in situ ellipsometry, showing the optical properties transformation. The final crystal structures were identified by XRD. The anatase film obtained by this deposition method displayed high carriers mobility as measured by time-resolved microwave conductance. This also confirms the high photocatalytic activity of the anatase films.