| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Rizzi, F.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2023Fabrication, Characterization, and Signal Processing Optimization of Flexible and Wearable Piezoelectric Tactile Sensorscitations
- 2023Biocompatible and Flexible Piezoelectric Thin Film Materials and Devices for Skin Compliant Transducerscitations
- 2023Modeling and development of an auxetic foam-based multimodal capacitive strain gaugecitations
- 2023Fabrication of a New Air-Gap FBAR on an Organic Sacrificial Layer through an Innovative Design Algorithmcitations
- 2021Conformable AlN Piezoelectric Sensors as a Non-invasive Approach for Swallowing Disorder Assessmentcitations
- 2021Photoresponse of the AlN-Based SAW Device on Polymeric and Silicon Substratescitations
- 2020Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater applicationcitations
- 2020Conformable surface acoustic wave biosensor for E-coli fabricated on PEN plastic filmcitations
- 2020A flexible carbon nanotubes‐based auxetic sponge electrode for strain sensorscitations
- 2015Low stiffness tactile transducers based on AlN thin film and polyimidecitations
- 2015Low stiffness tactile transducers based on AlN thin film and polyimidecitations
- 2015Low stiffness tactile transducers based on AlN thin film and polyimidecitations
- 2015Flexible AlN flags for efficient wind energy harvesting at ultralow cut-in wind speedcitations
- 2010Directional enhancement of refractive index and tunable wettability of polymeric coatings due to preferential dispersion of colloidal TiO2 nanorods towards their surfacecitations
Places of action
| Organizations | Location | People |
|---|
article
Low stiffness tactile transducers based on AlN thin film and polyimide
Abstract
<jats:p>In this paper, we propose a flexible piezoelectric MEMS transducer based on aluminum nitride thin film grown on polyimide soft substrate and developed for tactile sensing purposes. The proposed device consists of circular micro-cells, with a radius of 350 μm, made of polycrystalline c-axis textured AlN. The release of compressive stress by crystalline layers over polymer substrate allows an enhanced transduction response when the cell is patterned in circular dome-shaped geometries. The fabricated cells show an electromechanical response within the full scale range of 80 mN (≃200 kPa) both for dynamic and static load. The device is able to detect dynamic forces by exploiting both piezoelectric and flexoelectric capabilities of the aluminum nitride cells in a combined and synergistic sensing that occurs as voltage generation. No additional power supply is required to provide the electrical readout signals, making this technology suitable candidate when low power consumption is demanding. Moreover a capacitance variation under constant stress is observed, allowing the detection of static forces. The sensing ability of the AlN-based cells has been tested using an ad hoc setup, measuring both the applied load and the generated voltage and capacitance variation.</jats:p>