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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Guido, F.
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Topics
Publications (12/12 displayed)
- 2021Flexible piezoelectric AlN transducers buckled through package-induced preloading for mechanical energy harvestingcitations
- 2021Flexible piezoelectric AlN transducers buckled through package-induced preloading for mechanical energy harvestingcitations
- 2021Flexible piezoelectric AlN transducers buckled through package-induced preloading for mechanical energy harvestingcitations
- 2021Conformable AlN Piezoelectric Sensors as a Non-invasive Approach for Swallowing Disorder Assessmentcitations
- 2020Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater applicationcitations
- 2020Novel flexible triboelectric nanogenerator based on metallized porous PDMS and Parylene Ccitations
- 2018Flexible Piezoelectric Energy-Harvesting Exploiting Biocompatible AlN Thin Films Grown onto Spin-Coated Polyimide Layerscitations
- 2018Flexible Piezoelectric Energy-Harvesting Exploiting Biocompatible AlN Thin Films Grown onto Spin-Coated Polyimide Layerscitations
- 2015Low stiffness tactile transducers based on AlN thin film and polyimidecitations
- 2015Low stiffness tactile transducers based on AlN thin film and polyimidecitations
- 2015Flexible AlN flags for efficient wind energy harvesting at ultralow cut-in wind speedcitations
- 2012Tactile multisensing on flexible aluminum nitridecitations
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article
Low stiffness tactile transducers based on AlN thin film and polyimide
Abstract
<jats:p>In this paper, we propose a flexible piezoelectric MEMS transducer based on aluminum nitride thin film grown on polyimide soft substrate and developed for tactile sensing purposes. The proposed device consists of circular micro-cells, with a radius of 350 μm, made of polycrystalline c-axis textured AlN. The release of compressive stress by crystalline layers over polymer substrate allows an enhanced transduction response when the cell is patterned in circular dome-shaped geometries. The fabricated cells show an electromechanical response within the full scale range of 80 mN (≃200 kPa) both for dynamic and static load. The device is able to detect dynamic forces by exploiting both piezoelectric and flexoelectric capabilities of the aluminum nitride cells in a combined and synergistic sensing that occurs as voltage generation. No additional power supply is required to provide the electrical readout signals, making this technology suitable candidate when low power consumption is demanding. Moreover a capacitance variation under constant stress is observed, allowing the detection of static forces. The sensing ability of the AlN-based cells has been tested using an ad hoc setup, measuring both the applied load and the generated voltage and capacitance variation.</jats:p>