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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Guedj, Cyril
CEA LETI
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2023Homo-epitaxial growth of LiNbO3 thin films by Pulsed Laser depositioncitations
- 2019Atomistic modelling of diamond-type Si x Ge y C z Sn1− x − y − z crystals for realistic transmission electron microscopy image simulations
- 2019Atomistic modelling of diamond-type Si<i>x</i>Ge<i>y</i>C<i>z</i>Sn1−<i>x</i>−<i>y</i>−<i>z</i> crystals for realistic transmission electron microscopy image simulations
- 2018Impact of Hydrogen on Graphene-based Materials: Atomistic Modeling and Simulation of HRSTEM Images
- 2016Measurement of energy‐loss anisotropy along [001] in monoclinic hafnia and comparison with ab‐initio simulations
- 2014Evidence for anisotropic dielectric properties of monoclinic hafnia using valence electron energy-loss spectroscopy in high-resolution transmission electron microscopy and <i>ab initio</i> time-dependent density-functional theorycitations
- 2013Measurement of Complex Conductance in the PHz Frequency Range with Subnanometric Spatial Resolution: Application to the Grain Boundary of Monoclinic Hafniacitations
- 2008Evaluation of ellipsometric porosimetry for in‐line characterization of ultra low‐κ dielectricscitations
- 2006Influence of electron-beam and ultraviolet treatments on low-k porous dielectricscitations
Places of action
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article
Evidence for anisotropic dielectric properties of monoclinic hafnia using valence electron energy-loss spectroscopy in high-resolution transmission electron microscopy and <i>ab initio</i> time-dependent density-functional theory
Abstract
<jats:p>The effect of nanocrystal orientation on the energy loss spectra of monoclinic hafnia (m-HfO2) is measured by high resolution transmission electron microscopy (HRTEM) and valence energy loss spectroscopy (VEELS) on high quality samples. For the same momentum-transfer directions, the dielectric properties are also calculated ab initio by time-dependent density-functional theory (TDDFT). Experiments and simulations evidence anisotropy in the dielectric properties of m-HfO2, most notably with the direction-dependent oscillator strength of the main bulk plasmon. The anisotropic nature of m-HfO2 may contribute to the differences among VEELS spectra reported in literature. The good agreement between the complex dielectric permittivity extracted from VEELS with nanometer spatial resolution, TDDFT modeling, and past literature demonstrates that the present HRTEM-VEELS device-oriented methodology is a possible solution to the difficult nanocharacterization challenges given in the International Technology Roadmap for Semiconductors.</jats:p>