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Jaeger, Jean-Claude De
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Publications (4/4 displayed)
- 2014Dispersion properties and low infrared optical losses in epitaxial AlN on sapphire substrate in the visible and infrared rangecitations
- 2014Theoretical and experimental investigation of Lamb waves characteristics in AlN/TiN and AlN/TiN/NCD composite membranescitations
- 2013Optical properties of aluminum nitride thin films grown by direct-current magnetron sputtering close to epitaxycitations
- 2009AlN on nanocrystalline diamond piezoelectric cantilevers for sensors/actuatorscitations
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article
Dispersion properties and low infrared optical losses in epitaxial AlN on sapphire substrate in the visible and infrared range
Abstract
Optical waveguiding properties of a thick wurtzite aluminum nitride highly [002]-textured hetero-epitaxial film on (001) basal plane of sapphire substrate are studied. The physical properties of the film are determined by X-ray diffraction, atomic force microscopy, microRaman, and photocurrent spectroscopy. The refractive index and the thermo-optic coefficients are determined by m-lines spectroscopy using the classical prism coupling technique. The optical losses of this planar waveguide are also measured in the spectral range of 450-1553 nm. The lower value of optical losses is equal to 0.7 dB/cm at 1553 nm. The optical losses due to the surface scattering are simulated showing that the contribution is the most significant at near infrared wavelength range, whereas the optical losses are due to volume scattering and material absorption in the visible range. The good physical properties and the low optical losses obtained from this planar waveguide are encouraging to achieve a wide bandgap optical guiding platform from these aluminum nitride thin films. © 2014 AIP Publishing LLC