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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Genevois, Cecile
Conditions Extrêmes et Matériaux Haute Température et Irradiation
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2023Towards new zero-thermal-expansion materials: Li-free quartz solid solutions stuffed with transition metal cationscitations
- 2023Silicon Oxynitride Coatings Are Very Promising for Inert and Durable Pharmaceutical Glass Vialscitations
- 2022Towards new zero-thermal-expansion materials: Li-free quartz solid solutions stuffed with transition metal cations
- 2022Highly transparent bismuth borotellurite glass-ceramics: Comprehension of crystallization mechanismscitations
- 2019Persistent energy transfer in ZGO:Cr3+,Yb3+: a new strategy to design nano glass-ceramics featuring deep red and near infrared persistent luminescencecitations
- 2015Transparency through Structural Disorder: A New Concept for Innovative Transparent Ceramicscitations
- 2015Structure of Arsenic Selenide Glasses Studied by NMR: Selenium Chain Length Distributions and the Flory Modelcitations
- 2014Long-lasting luminescent ZnGa2O4:Cr3+ transparent glass-ceramicscitations
- 2014Chromium enrichment on the habit plane of dislocation loops in ion-irradiated high-purity Fe-Cr alloyscitations
- 2013Characterisation of Cr, Si and P distribution at dislocations and grain-boundaries in neutron irradiated Fe–Cr model alloys of low puritycitations
- 2012Atomic scale observation of phase separation and formation of silicon clusters in Hf higk-κ silicatescitations
- 2011Effect of neutron-irradiation on the microstructure of a Fe–12at.%Cr alloycitations
Places of action
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article
Atomic scale observation of phase separation and formation of silicon clusters in Hf higk-κ silicates
Abstract
International audience ; Hafnium silicate films were fabricated by RF reactive magnetron sputtering technique. Fine microstructural analyses of the films were performed by means of high-resolution transmission electron microscopy and atom probe tomography. A thermal treatment of as-grown homogeneous films leads to a phase separation process. The formation of SiO2 and HfO2 phases as well as pure Si one was revealed. This latter was found to be amorphous Si nanoclusters, distributed uniformly in the film volume. Their mean diameter and density were estimated to be about 2.8 nm and (2.960.4) 1017 Si-ncs/cm3, respectively. The mechanism of the decomposition process was proposed. The obtained results pave the way for future microelectronic and photonic applications of Hf-based high-j dielectrics with embedded Si nanoclusters